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Electrostatic device

A device, electrostatic technology, applied in electrostatic motors, circuits, electrostatic generators/motors, etc., can solve problems such as large support/elastic passive area out-of-plane movement, and achieve improved load adaptability, flexible design parameters, and general design parameters. Effect

Inactive Publication Date: 2004-03-03
拉德・哈桑・达巴
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Several problems encountered with comb drive actuators include: relatively large support / elastic passive area, limited out-of-plane movement, difficulty maintaining the desired center-balanced finger position, especially at small gap widths

Method used

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Embodiment Construction

[0038] Here, it is obvious to those skilled in the art that the above-mentioned actuators can be used as sensors, so the term "device" is meant to include both actuators and sensors. Furthermore, in general, for simplicity, the description focuses on actuators, meaning that equivalent sensors are also included.

[0039] In this specification, the electrode E1 refers to elements 1 , 31 , 91 and 101 described below, and the electrode E2 refers to elements 2 , 32 , 92 and 102 described below. Devices capable of deflecting or bending about one or more axes are referred to herein as uniaxial devices, biaxial devices, and the like.

[0040] The embodiment of the device shown with reference to Figures 1, 2a and 2b is capable of deflecting about one axis (in this example about the Z axis). Figure 1 shows the device in plan view, while Figure 2a shows the device in side view. For ease of understanding, Figure 1 only schematically shows the first layer, but it is represented in solid ...

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Abstract

An electrostatic device ( 10 ) includes a first flexible electrode ( 1 ) on which a plurality of second electrodes ( 2 ) are mounted so as to move with the first electrode ( 1 ). Upon the application of an electrical charge, the or each second electrode ( 2 ) causes deflection of the first electrode ( 1 ) which deflection is enhanced by the movement of the second electrode therewith. A variety of different designs of the device are possible to provide movement of the first electrode in a plurality of directions and also different types of in and out of plane movement, including rotation and twisting. The structure enables the device to operate at voltage levels compatible with integrated circuits and for the device to be manufactured using integrated circuit manufacturing techniques.

Description

technical field [0001] The present invention relates to electrostatic devices, and more particularly to actuators and sensors of the type commonly referred to as microelectromechanical systems (MEMS) or micromechanical devices. Background technique [0002] In general, whether it is an actuator or a sensor, prior art electrostatic transducing devices include first and second elements connected to a driving voltage source. The resulting attractive electrostatic force moves at least one of the elements towards the other. To this end, the element is generally constructed of conductive materials such as metals and doped polysilicon in order to facilitate charging and discharging and to ensure proper operation. [0003] Prior art devices such as a typical cantilever with a movable electrode suspended with a gap on a fixed counter electrode are disclosed, for example, in "Micromachined Transducers Sourcebook" by G.T.A. Kovacs, WCB / McGraw-Hill, 1998, pp. actuator. This encounter...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B81B3/00H02N1/00
CPCH01G5/18H02N1/006
Inventor 拉德·哈桑·达巴
Owner 拉德・哈桑・达巴
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