Monochromator of chip tester

Abstract

A monochrometer comprising diffraction wafer base, diffraction wafer and optical gate of incoming light is featured as setting Y directional slider and X directional slider on diffraction wafer base, coordinating the sliders in sliding with Y directional guide way and X directional guide way.

Description

Technical field: [0001] The invention relates to a wafer testing instrument in the electronic industry, in particular to a monochromator with a fixed outlet for synchrotron radiation of an optical wafer testing machine. Background technique: [0002] Existing monochromators, especially monochromators used for optical test wafers, have a rotatable base under the diffractive wafer. Adjusting the position and angle of the base can meet the diffraction conditions of the diffractive wafer and the incident light, and obtain the diffracted rays. The position of this diffracted ray is fixed and cannot be adjusted in any way. The instrument requires the light to pass through the center of the rotation axis of the film testing table, otherwise the measurement result will be inaccurate, but this beam of diffracted light must just fall on the rotation axis of the film testing table, so the entire heavy film testing table must be moved to meet the above requirements. Require. Its movi...

AI Technical Summary

Problems solved by technology

Due to the high position accuracy requirements and the heavy measuring table, even if the table is adjusted in place, the slight movement generated when the fixing screw is turned will still cause the beam to deviate from the axis. First, it is easy to reduce the accuracy of the test results. Second, Affect the test rate

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