Semiconductor device, semiconductor module and method of manufacturing semiconductor device
A semiconductor and device technology, applied in the field of semiconductor devices
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Embodiment 1
[0065] Below, refer to Figure 1 to Figure 9 , the semiconductor device, the semiconductor module, and the manufacturing method of the semiconductor device in Embodiment 1 based on the first invention will be described.
[0066] Such as figure 1 As shown, the semiconductor module 101 of this embodiment is composed of a plurality of semiconductor devices 120a to 120d constituting a substrate and a plurality of electronic components 111a to 111c provided on the substrate to which the semiconductor devices 120a to 120d are connected.
[0067] In this embodiment, the electronic component 111 is constituted by a semiconductor package incorporating a semiconductor chip 112 . The electronic component 111 mounted on the substrate connecting the semiconductor devices 120a to 120d may be constituted by discrete elements such as resistors and capacitors in addition to such semiconductor packages.
[0068] In addition, the semiconductor packages constituting the electronic component 111...
Embodiment 2
[0091] Below, refer to the attached Figures 10 to 15 , the semiconductor device and its manufacturing method in Embodiment 2 based on the second invention will be described.
[0092] Such as Figure 10 As shown, the semiconductor device 202 of this embodiment has a plurality of semiconductor chips 203a to 203c, and the main surface of the semiconductor chip 203a is inclined to the main surfaces of the semiconductor chips 203b and 203c. The semiconductor device 202 is electrically connected to an insulating circuit substrate 211 as a base member. In addition, the semiconductor device 202 is sealed with a sealing material 221 to constitute a semiconductor device package 201 .
[0093] A plurality of electrodes 207 are provided on the lower surface of the insulating circuit substrate 211 . In addition, wiring 208 is provided at an appropriate position between electrodes 207 . In addition, a plurality of electronic components 261 connected to the electrodes 207 are arranged o...
Embodiment 3
[0117] Below, refer to Figure 16 , the semiconductor device in Embodiment 3 based on the third invention will be described.
[0118] Such as Figure 16 As shown, the semiconductor device 301 of this embodiment is equipped with: a substrate 311; a base member 321 whose first main surface is opposite to the substrate 311 and fixed on the substrate 311; and a semiconductor device fixed on the second main surface of the base member 321. Chip 331. A conductive material 322 penetrating from the first main surface to the second main surface of the base member 321 is provided in a portion of the base member 321 not overlapping the semiconductor chip 331 . The electrode 332 of the semiconductor chip 331 is electrically connected to the first main surface side of the conductive material 322 through the wiring 323 . The electrodes provided on the substrate 331 are connected to the second main surface side of the conductive material 322 .
[0119] The substrate 311 is constituted by ...
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