Two degrees of freedom moving planar parallel mechanism

Abstract

This invention belongs to industry robot field and provides a two free degree plane parallel structure, which comprises fixed platform and moving platform and the moving chain composed of slide block and connection bar. The fixed platform comprises two vertical guide rails. The connection plate connects the drive slide block and passive block. The kinematic pair between slide blocks, drive slide block, passive block and fixed platform is moving pair and other kinematic pair between the rest parts is rotation pair.

Description

technical field

[0001] The invention belongs to the field of industrial robots, and in particular relates to a two-degree-of-freedom moving plane parallel mechanism, which is especially suitable for a welding head mechanism of a wafer bonding machine, a key equipment of a semiconductor post-process production line. Background technique

[0002] The parallel mechanism is a closed-loop kinematic system composed of multiple parallel chains, that is, one end of multiple kinematic chains is connected to a terminal operator with multiple degrees of freedom at the same time. The parallel mechanism has the following advantages: high stiffness-to-weight ratio; high load-to-weight ratio; small error and high precision; it is easy to place the drive motor on the machine base, which reduces the motion load and can move at high speed; in position solving , the reverse solution of the parallel mechanism is easy; the structure is simple and the degree of modularization is high.

[0003] I...

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