Substrate processing apparatus and substrate processing method

A substrate processing device and substrate technology, which are applied to electric heating devices, electric digital data processing, and other seating furniture, etc., can solve problems such as time required

Inactive Publication Date: 2005-09-14
DAINIPPON SCREEN MTG CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] However, since the procedure for recovering from the failure displayed on the operation panel of the above-mentioned substrate processing apparatus is simply displayed in words, it is necessary to further read the detailed instruction manual in order to recover from the failure, which requires time and effort.

Method used

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  • Substrate processing apparatus and substrate processing method
  • Substrate processing apparatus and substrate processing method
  • Substrate processing apparatus and substrate processing method

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Embodiment Construction

[0045] Hereinafter, an embodiment of the present invention will be described with reference to the drawings.

[0046] In the following description, a substrate refers to a semiconductor wafer, a glass substrate for a liquid crystal display device, a glass substrate for a PDP (plasma display panel), a glass substrate for a photomask, a substrate for an optical disc, and the like.

[0047] (1) One embodiment

[0048] Figure 1A , Figure 1B is a schematic configuration diagram of the substrate processing apparatus 100 according to the present embodiment, figure 2 It is a figure explaining the structure of the multistage heat-processing unit 2a-2d of FIG. Figure 1A is a plan view of the substrate processing apparatus 100, Figure 1B is a front view of the substrate processing apparatus 100 .

[0049] Figure 1A , Figure 1B The illustrated substrate processing apparatus 100 includes an indexer ID, an interface unit IF, a processing unit unit MP, and a control unit 500 .

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PUM

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Abstract

A moving image representing a maintenance method is reflected on a moving image display section in an operation panel. A worker can grasp the maintenance method by seeing the moving image displayed on the moving image display section. Consequently, maintenance can be performed in a short time and accurately in accordance with the moving image displayed on the moving image display section.

Description

technical field [0001] The present invention relates to a substrate processing apparatus and a substrate processing method for performing predetermined processing on a substrate. Background technique [0002] In recent years, a substrate processing apparatus provided with a plurality of processing units such as a liquid processing unit and a heat processing unit has been developed. In this substrate processing apparatus, since it is necessary to perform a series of processing on the substrate, a substrate transfer robot capable of transferring the substrate between the plurality of processing units is provided. [0003] A substrate processing apparatus is being developed that displays predetermined information about the failure on an operation panel when a failure occurs in the substrate transfer robot (see Japanese Patent Application Laid-Open No. 11-307612). In this substrate processing apparatus, when a failure occurs, the procedure for recovering from the failure is dis...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L21/02G06F11/00H01L21/00
CPCH01L21/67253H01L21/67276A47C21/048A47C27/085H05B3/20
Inventor 西村让一大谷正美
Owner DAINIPPON SCREEN MTG CO LTD
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