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Microactuator

一种微驱动器、梳型的技术，应用在仪器、微结构技术、静电电动机等方向，能够解决大驱动力、静电力降低、不能可动部高速地驱动等问题，达到提高平面度、缩小间隙、提高刚性的效果

Inactive Publication Date: 2005-11-02
PANASONIC CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

When the gap between the comb teeth is enlarged to avoid such contact, there is a problem that the generated electrostatic force decreases.
In addition, since the weight of the movable part increases when the height of the comb tooth part is increased, there is a problem that a large driving force is required as mentioned above, and the problem that the movable part cannot be driven at a high speed

Method used

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  • Microactuator
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Examples

Experimental program
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Effect test

Embodiment Construction

[0044] Hereinafter, embodiments of the present invention will be described with reference to the drawings.

[0045] (Embodiment 1)

[0046] refer to Figure 1 to Figure 6 , the first embodiment of the microactuator of the present invention will be described.

[0047]First, refer to figure 1 and Figure 2. figure 1 And FIG. 2 is an exploded perspective view schematically showing the microdrive 100 of this embodiment. figure 1 2 is an exploded perspective view of the microdrive 100 viewed obliquely from above; FIG. 2 is an exploded perspective view of the microdrive 100 viewed obliquely from below. exist figure 1 In , a part of the movable part is cut off, and the cross section of the back side of the movable part is also shown. The micro-actuator 100 is manufactured by using a microfabrication technology using a semiconductor process and a MEMS (Micro Electro Mechanical System) technology.

[0048] The micro-actuator 100 includes a base 1, a plurality of first comb-shaped...

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PUM

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Abstract

There has been a trade-off between the rigidity and the mass of a movable section of a microactuator, and also between the rigidity of the movable section and the electrostatic force. A microactuator 100 includes: a base 1; a first comb electrode 2 supported by the base 1; a movable section 6 having a second comb electrode 8 opposing the first comb electrode 2, and at least one reinforcement rib 9 protruding toward the base 1; and an elastic supporting member 3 for supporting the movable section 6 so as to allow the movable section 6 to be displaced with respect to the base 1. The height of the second comb electrode 8 is different from the height of the at least one reinforcement rib 9.

Description

technical field [0001] The present invention relates to a micro-actuator which has a comb-shaped electrode and uses electrostatic force to displace a movable part. The microactuator of the present invention can be used, for example, as a micromirror device having a light reflecting surface on a movable part. Background technique [0002] A micro-actuator to which microfabrication technology is applied is used, for example, as an optical scanning device in a laser printer, a scanner, a display, etc., or an optical switching device for switching light input and output to an optical fiber. [0003] Patent Document 1 discloses a microactuator that has comb-shaped electrodes and functions as a light deflector. The movable part of this light deflector has a mirror surface functioning as a light reflection surface. The movable part is supported by two beams arranged on the same line, and the electrostatic force generated between the comb-shaped electrodes provided on the movable ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B81B3/00G02B26/08H02N1/00
CPCH02N1/008B81B3/0062B81B2201/033G02B26/0841B81B2201/042B81B3/00B81B2203/053B81B2203/058
Inventor 黑塚章虫鹿由浩梶野修
Owner PANASONIC CORP