Bidimension photoelectric self collimating device based on optical length multiplication compensation method and its measuring method

A photoelectric self-collimation and compensation method technology, applied in the direction of using optical devices, measuring devices, instruments, etc., can solve the difficulty of further improving measurement uncertainty, poor measurement stability of photoelectric autocollimators, and limitations of photoelectric autocollimators. Issues such as the scope of application, to achieve the effect of easy reception and monitoring, easy design, and miniaturization

Inactive Publication Date: 2006-01-11
HARBIN INST OF TECH
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0012] However, in practical applications, especially from the optical path, mechanical structure and measurement process, it can be seen that the above measurement schemes have the following shortcomings: since no error compensation or correction is used, the angular drift of the beam is not eliminated during the measurement process , and finally mixed with the angle measurement error caused in the measurement results, it directly leads to the poor measurement stability of the photoelectric autocollimator, and it is difficult to further improve the measurement uncertainty, which greatly limits the application range of the photoelectric autocollimator. This is the measurement scheme The inadequacy of itself is also an important problem that cannot be solved in the practical application of the current photoelectric autocollimator.

Method used

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  • Bidimension photoelectric self collimating device based on optical length multiplication compensation method and its measuring method
  • Bidimension photoelectric self collimating device based on optical length multiplication compensation method and its measuring method
  • Bidimension photoelectric self collimating device based on optical length multiplication compensation method and its measuring method

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Effect test

Embodiment 1

[0067] Such as figure 1 The shown two-dimensional photoelectric self-collimation device first adjusts the optical path multiplication device 9, and here, the optical path multiplication device 9 is as figure 1 As shown, it consists of two relatively parallel plane mirrors 10 and 11. After the adjustment, the optical path multiplication device 9 should be fixed, and then the two-dimensional photoelectric self-collimation device is calibrated. After the calibration is completed, the optical path multiplication device is multiplied during use. Device 9 is no longer adjusted. When measuring, the laser beam emitted by the laser light source 1 is divided into two beams by the pre-beam splitter 2: the transmitted beam becomes the measuring beam, and the reflected beam becomes the reference beam with exactly the same characteristics as the measuring beam; the reference beam enters the optical path multiplication device After 9, the optical path multiplying device 9 reflects the refer...

Embodiment 2

[0072] Such as figure 1 Shown two-dimensional photoelectric self-collimation device, here, the optical path multiplication device 9 is by such as figure 2 The shown two planar mirrors 10 and 11 arranged parallel to each other are composed of an additional planar mirror 12 located in the path of the reference beam. The optical path multiplying device 9 reflects the reference beam multiple times, prolongs the optical path of the reference beam, and amplifies the linear displacement corresponding to the beam angle drift. Other components and working principles of this embodiment are the same as those of Embodiment 1.

Embodiment 3

[0074] Such as figure 1 Shown two-dimensional photoelectric self-collimation device, here, the optical path multiplication device 9 is by such as Figure 3a The two rectangular prisms 13 and 14 shown facing each other are formed. The optical path multiplying device 9 reflects the reference beam multiple times, prolongs the optical path of the reference beam, and amplifies the linear displacement corresponding to the beam angle drift. Other components and working principles of this embodiment are the same as those of Embodiment 1.

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Abstract

The present invention relates to high precision 2-D photoelectric autocollimating equipment based on optical path multiplication compensation method. Said equipment successively includes laser light source, calibrated plate, main spectroscope, main CCD image sensor, collimating objective and measurement reflector. Besides, said invention also provides its measurement method and concrete steps.

Description

technical field [0001] The invention belongs to the technical field of precision instrument manufacturing and precision test and measurement, and in particular relates to a high-precision two-dimensional photoelectric self-collimation device and a measurement method for real-time compensation of the angular drift of light beams based on an optical path multiplication compensation method. Background technique [0002] With the continuous improvement and improvement of measurement technology, the development of modern high-precision measurement technology and azimuth targeting and tracking system has put forward higher and higher requirements for the measurement accuracy of small angles. Photoelectric autocollimator plays an irreplaceable role in small-angle precision measurement, high-precision aiming and positioning. It can be used as a component of optical measuring instruments such as goniometers and optical comparators, and can also be used alone in measuring instruments f...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/26
Inventor 谭久彬敖磊崔继文
Owner HARBIN INST OF TECH
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