Macro/micro driven two-degree-of-freedom high-acceleration high-precision parallel positioning system

A high-acceleration, positioning system technology, applied in measurement devices, instruments, optical devices, etc., can solve the problems of large linear motion inertia, poor end effector stiffness, low positioning accuracy, etc., and achieve good kinematic performance and dynamics. The effect of high performance, large load capacity and high positioning accuracy

Active Publication Date: 2006-02-08
CHANGZHOU MINGSEAL ROBOT TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] The purpose of the present invention is to solve the problem that the existing motion positioning system in the field of IC/MEMS packaging adopts a series structure and has a large linear motion inertia of the base platform, which restricts the motion acceleration and speed of the entire system, and the effective load and work efficiency of the system are low. ; There are difficulties in the structural design of the decoupling device when using

Method used

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  • Macro/micro driven two-degree-of-freedom high-acceleration high-precision parallel positioning system
  • Macro/micro driven two-degree-of-freedom high-acceleration high-precision parallel positioning system
  • Macro/micro driven two-degree-of-freedom high-acceleration high-precision parallel positioning system

Examples

Experimental program
Comparison scheme
Effect test

Example Embodiment

[0006] Specific embodiment 1: This embodiment is described with reference to Figs. 1 and 2. This embodiment consists of a base 1, an X-axis linear drive device 2, a Y-axis linear drive device 3, an X-axis linear guide, a Y-axis linear guide, and an X-axis. Linear grating 4, Y-axis linear grating 5, X-axis guide rail support 6, Y-axis guide rail support 7, X-axis mobile platform assembly 8, Y-axis mobile platform assembly 9, X-axis end platform 10, Y-axis end platform 11. X-axis parallel link mechanism 12, Y-axis parallel link mechanism 13, air-floating support 14, and end output platform 15; X-axis guide rail supports 6 and Y-axis are respectively fixed on the opposite corners of base 1 The guide rail support 7, the base 1 at the intersection of the axis of the X-axis guide rail support 6 and the axis of the Y-axis guide support 7 is fixed with an air floatation support 14, and the upper end surface of the air floatation support 14 and the end output platform 15 The lower end surf...

Example Embodiment

[0007] Specific embodiment two: This embodiment is described with reference to Fig. 1 and Fig. 2. The X-axis linear guide of this embodiment consists of X-axis upper left linear guide 16, X-axis upper right linear guide 17, X-axis lower left linear guide 18 and X The lower layer of the shaft is composed of the right linear guide 19; the upper left linear guide 16 of the X-axis is fixed in the upper left groove 6-1 of the X-axis guide support 6, and the upper right linear guide 17 of the X-axis is fixed to the X-axis guide support 6 In the upper right groove 6-2 of the X-axis, the lower left linear guide 18 of the X-axis is fixed in the lower left groove 6-3 of the X-axis guide support 6, and the lower right linear guide 19 of the X-axis is fixed in the X-axis guide support. In the groove 6-4 at the lower right end of the seat 6. The use of the X-axis double-layer linear guide can ensure that the X-axis mobile platform assembly 8 is driven by the X-axis linear drive device 2 to mov...

Example Embodiment

[0009] Specific embodiment three: This embodiment will be described with reference to Figures 1 and 2. The Y-axis linear guide of this embodiment consists of the upper left linear guide 20 on the Y axis, the upper right linear guide 21 on the Y axis, the lower left linear guide 22 on the Y axis and the Y axis. The lower layer of the axis consists of the right linear guide 23; the upper left linear guide 20 of the Y axis is fixed in the upper left groove 7-1 of the Y axis guide support 7, and the upper right linear guide 21 of the Y axis is fixed to the Y axis guide support 7. In the upper right groove 7-2 of the Y-axis, the lower left linear guide 22 of the Y-axis is fixed in the lower left groove 7-3 of the Y-axis guide support 7, and the lower right linear guide 23 of the Y-axis is fixed in the Y-axis guide support. In the groove 7-4 at the lower right end of the seat 7. The use of the Y-axis double-layer linear guide can ensure that the Y-axis mobile platform assembly 9 is driv...

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PUM

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Abstract

The invention relates to a parallel orientating system with two free degree, high acceleration, high precision and macro/micro dual driven. The mutually perpendicular X-shaft liner driven apparatus 2 and Y-shaft liner driven apparatus are fixed on the base 1; the X-shaft liner driven apparatus 2 is fastened with X-shaft moving platform assembly 8; the Y-shaft liner driven apparatus 3 is fastened with Y-shaft moving platform assembly 9; the X-shaft parallel linkage 12 is hinged between X-shaft moving platform assembly 8 and X-shaft end platform 10; the Y-shaft parallel linkage 13 is hinged between Y-shaft moving platform assembly 9 and Y-shaft end platform 11; the X-shaft end platform 10 and the Y-shaft end platform 11 are fastened with the end output platform 15.

Description

Technical field: [0001] The invention relates to a motion positioning system, which belongs to the technical field of industrial motion positioning, in particular to a parallel positioning system with two degrees of freedom, high acceleration and high precision driven by a macro / micro drive. Background technique: [0002] At present, the motion positioning system used in the field of integrated circuit (IC) and micro-electromechanical system (MEMS) packaging has the following problems: 1. The XY workbench method with series structure is adopted. Since the upper platform is the workload of the lower platform, the lower The linear motion inertia of the platform is large, which restricts the motion acceleration and speed of the entire system, and the effective load and work efficiency of the system are low; 2. The parallel structure XY table method needs to use a decoupling device for XY axis linear motion, and its structural design High stiffness and low friction are required,...

Claims

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Application Information

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IPC IPC(8): G01B21/02G01B11/02G01B5/02
Inventor 孙立宁刘延杰荣伟彬曲东升李娟
Owner CHANGZHOU MINGSEAL ROBOT TECH CO LTD
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