Base plate processing device

A substrate processing device and substrate technology, applied to measuring devices, optical devices, and devices for coating liquid on the surface, etc., can solve problems such as poor coating, damage to slit nozzles, and attenuation of light received by lasers, and achieve suppression of errors. Effects of detection, accuracy improvement, and burden reduction
CN1739865AActive Publication Date: 2006-03-01DAINIPPON SCREEN MTG CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
DAINIPPON SCREEN MTG CO LTD
Publication Date
2006-03-01

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Abstract

To reduce the load on workers while preventing lowering of the precision of the detection of an object. A substrate processing apparatus is provided with a light projecting part 450a and a light receiving part 450b which constitute a detection sensor 450. The light receiving part 450b is shifted in the (+Z) direction from a position where laser beam emitted from the light projecting part 450a is received and arranged at a position where the reflection light reflected by the object is received. In the substrate processing apparatus, when the light receiving part 450b receives the laser beam, it is judged that the object is existed and a movement mechanism of a slit nozzle is controlled.
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Description

technical field

[0001] The present invention relates to a technique of a substrate processing apparatus that applies a processing liquid to a surface of a substrate by scanning the substrate while ejecting the processing liquid from a nozzle. More specifically, it relates to a technique for detecting a target object with high accuracy in order to prevent the nozzle from interfering with a foreign object (object) during scanning using a nozzle. Background technique

[0002] In the manufacturing process of glass square substrates for liquid crystals, semiconductor wafers, flexible substrates for thin-film liquid crystals, substrates for photomasks, substrates for color filters (hereinafter simply referred to as "substrates"), etc., the process of applying a treatment liquid to the surface of the substrate is used. Coating equipment (substrate processing equipment). As a coating device, there are known a slit coater that performs slit coating using a slit nozzle having a slit-...

Claims

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