Gas laser oscillator

A technology of gas lasers and oscillators, applied in lasers, laser components, phonon exciters, etc., can solve problems such as difficult to prevent damage to discharge tubes, and achieve the effect of preventing insulation damage and preventing damage

Inactive Publication Date: 2006-07-05
FANUC LTD
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In the laser oscillation device disclosed in JP-A-7-221378, abnormality of the laser gas can be judged, but a high voltage is applied before the abnormality judgment, so it is difficult to prevent damage to the discharge tube that may occur before the discharge is lit.

Method used

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Embodiment Construction

[0029] Hereinafter, embodiments of the present invention will be described with reference to the drawings. In the following drawings, the same reference symbols are attached to the same components. For ease of understanding, the scales of these drawings are appropriately changed.

[0030] figure 1 It is a schematic diagram of a gas laser oscillator based on the present invention. like figure 1 As shown, the laser oscillator 10 is a gas laser oscillator of the induction discharge excitation type, and includes discharge tube sections 6 a - 6 b connected to a laser gas pressure control system 18 . The laser gas pressure control system 18 can supply the laser gas to the discharge tube segments 6 a to 6 b and discharge the laser gas from the discharge tube segments 6 a to 6 b. like figure 1 As shown, a non-partially penetrating rear reflector 7 (resonator internal reflector) is provided at one end of the laser oscillator 10, and a partially penetrative output reflector 8 is pr...

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PUM

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Abstract

A gas laser oscillator (10) provided with voltage detecting means (4a to 4d) for detecting the voltage of each of a plurality of discharge tube segments (6a to 6d) of a discharge tube before start of discharge and a discharge tube segment start judging means (1) for judging if each of the plurality of discharge tube segments (6a to 6d) has started based on the voltage of the discharge tube segments (6a to 6d) detected by the voltage detecting means (4a to 4d), wherein the discharge tube segment start judging means (1) allows all of the plurality of discharge tube segments (6a to 6d) to start only when the voltages of all of the discharge tube segments (6a to 6d) of the plurality of discharge tube segments are smaller than a predetermined voltage (Vb) is provided. Due to this, it is possible to judge an abnormality in the laser gas before the start of discharge without any work on the part of the operator and thereby prevent the discharge tube from being damaged.

Description

technical field [0001] The invention relates to a gas laser oscillator, in particular to a gas laser oscillator used in a laser processing machine. Background technique [0002] A general gas laser oscillator, such as the gas laser oscillator disclosed in JP-A-7-221378, excites the laser gas enclosed in the discharge tube by the discharge energy between the discharge electrodes, and generates gas ions in the excited state that are released when they return to the ground state. A laser with an oscillation wavelength of comparable energy. [0003] However, when the gas laser oscillator has been stopped for a long time, when the laser gas source (gas cylinder) supplied to the discharge tube has become empty, or when the inside of the gas laser oscillator has been opened to the atmosphere, etc. In this case, the blower used to circulate the laser gas in the discharge tube, that is, the lubricating oil of the turbo blower is vaporized and mixed into the laser gas in the discharg...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01S3/00
CPCH01S3/09705H01S3/073H01S3/036
Inventor 江川明安藤稔森敦
Owner FANUC LTD
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