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Method for improving permanent-magnetic linear motor motion precision

A permanent magnet linear motor, motion accuracy technology, applied in the estimation/correction of motor parameters, non-electric variable control, AC motor control, etc. Control complexity increases, reduces the effect of hardware

Active Publication Date: 2007-01-17
SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Due to force fluctuations, the mover of the linear motor will cause unstable movement under the influence of inertia, resulting in a decrease in displacement accuracy

Method used

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  • Method for improving permanent-magnetic linear motor motion precision
  • Method for improving permanent-magnetic linear motor motion precision
  • Method for improving permanent-magnetic linear motor motion precision

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Embodiment Construction

[0013] The invention relates to a method for improving the motion precision of a permanent magnet linear motor. A specific embodiment of the present invention is as follows: first clear the feed-forward signal table, and the size of the table is determined according to the computing capability and motion range of the system. Then, control the motor to move to the initial position, and move to the final position at a slower speed (the magnetic force influence can be accurately compensated); utilize a position acquisition sensor, such as a known encoder, a grating ruler, which can acquire the position by relative movement Information, the accuracy can reach the micron level, the actual displacement information is collected, and the electromagnetic force corresponding to each position is collected at the same time (the current value of the corresponding motor is converted into a force value, and the relationship between the current and the force value is linear). Then move from t...

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Abstract

The method comprises: based on the linear motor control ring composed of PID control module, driver and motor, an accuracy table is added in front of the driver; when the motor reaches a position recorded in the accuracy table, a feed-forward control signal is added in term of the secondary force value in the table such that a reversed force is applied so as to lower the level of system fluctuate.

Description

Technical field [0001] The invention relates to the technical field of electrical engineering, in particular to a method for improving the motion precision of a permanent magnet linear motor. Background technique [0002] As the ultra-precision workpiece table of the lithography machine, the linear motor is one of the core components of the lithography machine, and its motion accuracy directly affects the resolution of the lithography machine. Because the lithography machine is a precision equipment, the precision requirements of its motion system are very high, so the linear motor is used as the preliminary positioning device, and its precision also needs to reach the micron level. Therefore, how to further improve the motion accuracy of the system has become a research topic for many professionals. [0003] In Chinese Patent No. CN1592051, it is disclosed that the linear motor can improve the accuracy by improving the support, heat dissipation structure, vibration isolati...

Claims

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Application Information

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IPC IPC(8): H02P23/00H02P23/14G05D13/00H02P25/06
Inventor 李娟
Owner SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
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