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Sensing method for sample topography and property under nano size

A nanoscale, sample technology, applied in measurement devices, instruments, scientific instruments, etc., can solve problems such as deepening the understanding of surface morphology and properties, and achieve the effect of enriching understanding

Inactive Publication Date: 2007-01-24
董再励
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Problems solved by technology

[0003] However, the above-mentioned perception only allows people to perceive the surface topography of the object visually. If the photoelectric signal during the operation / scanning process can be used, people can also perceive the surface topography and properties of the object tactilely. The expansion of visual perception to multi-dimensional perception with both visual and tactile senses is bound to deepen people's understanding of the surface morphology and properties of objects at the nanoscale
Combining this technology with SPM enables SPM to develop from simply providing visual perception to simultaneously providing visual and tactile perception. have deep significance, but have not been reported yet

Method used

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  • Sensing method for sample topography and property under nano size
  • Sensing method for sample topography and property under nano size
  • Sensing method for sample topography and property under nano size

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Embodiment Construction

[0012] The present invention will be further described in detail below in conjunction with the accompanying drawings, embodiments and principles.

[0013] In this embodiment, the signals of different types of surface topography of representative samples from the SPM microscope are converted into signals representing force values ​​through signal processing, and the perceived force is output through the tactile device.

[0014] Wherein: the tactile device is a mechanical device with a force feedback function, and the present embodiment adopts the PHANTOM(R) DeskTop 6DOF device of SENSABLE Company; the signal processing is to convert an analog signal into a digital signal by an analog-to-digital converter (prior art), The noise is filtered out through digital filtering, and the output signal is connected to the input terminal of the haptic device after amplification processing (for example: multiplying by a constant). The digital filtering adopts FIR digital filter, and the data...

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Abstract

The invention discloses method for sensing appearance and property of sample under Nano size. Through signal process, the method converts signal of representing features of appearance on surface of sample from SPM microscope to signal of representing magnitude of force value. Then, touch sensation device outputs the sensed force. Different optical, electric, and magnetic signals represent information of appearances and properties of different of surfaces. The invention makes corresponding force signal represent one of such information. Thus, SPM expands to multiple sensing areas including image and touch sensation from imaging sensing area only. The invention enriches people's recognition of appearance and property of sample under Nano size.

Description

technical field [0001] The invention relates to a nanoscale sample morphology and property perception technology, in particular to a nanoscale sample morphology and property perception method based on the photoelectric signal of a scanning probe microscope. Background technique [0002] Since 1986, Ge Binney and others invented the Scanning Probe Microscope (SPM), allowing people to enter the field of vision from the micrometer scale to the nanometer scale, allowing people to explore the mysteries of the nanometer world. 1 nanometer is 10 -9 This is a scale that cannot be resolved by any optical microscope. SPM has achieved this, but any commercial SPM on the market can only use images to represent the surface morphology and properties of the sample, and can only provide people with a sample. For sub-static images, in order to deepen people's understanding of the surface morphology of objects at the nanoscale, people use various photoelectric signals during the scanning pro...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N13/10G01Q30/00
Inventor 董再励刘连庆焦念东田孝军
Owner 董再励
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