This application discloses a
tactile sensor and its fabrication method. The
tactile sensor includes a tactile membrane, an optical window, a cavity, a deformation structure, and a
capacitor structure. The cavity is enclosed by a
cavity wall and two opposing openings at both ends. The two openings respectively house the tactile membrane and the optical window. The deformation structure is located within the cavity and is used to absorb energy from an external
light source. Under photothermal action, it deforms, thereby displacing the tactile membrane to generate tactile stimulation that can act on a target object. The
capacitor structure converts the tactile stimulation into an electrical
signal for tactile
information acquisition. This application utilizes the deformation structure to deform within a certain temperature range, thereby displacing the tactile membrane and converting
light energy into tactile output. This avoids the dependence of traditional light-driven tactile devices on closed air cavities,
gas expansion, and suspended light-absorbing sheets, improving the
structural stability and driving efficiency of the
tactile sensor and increasing its environmental adaptability.