Treating liquid feed device

A technology for supplying devices and processing liquids, which is applied in the fields of cleaning methods using liquids, electrical components, and semiconductor/solid-state device manufacturing. It can solve problems such as leakage, improve processing efficiency, suppress leakage, and reduce processing costs.

Inactive Publication Date: 2007-02-07
FUTURE VISION
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  • Abstract
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  • Claims
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Problems solved by technology

[0005] However, in the processing liquid supply device described in Patent Document 1, there is a problem that the width dimension (dimension in the direction perpendicular to the substrate conveyance direction) of the upper and lower housings is sufficiently long compared with the length dimension (dimension in the substrate conveyance direction). , and in the case of using a hydrophobic material (such as a synthetic resin material) as the material constituting the housing, etc., the processing liquid introduced into the substrate processing path between the upper and lower housings is drawn from the processing liquid supply side end of the upper and lower housings. part and the end part on the treatment liquid discharge side leaks to the outside

Method used

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Embodiment Construction

[0033] The processing liquid supply device of the present invention is configured as follows: it is installed in the middle of a transport path for transporting a substrate in a horizontal posture, supplies the processing liquid countercurrently from the upper and lower housings to the front and back of the substrate to the substrate being transported, and performs a predetermined process, and The processed treatment liquid can be recovered through the upper and lower housings, that is, it is an improved device of the treatment liquid recovery type.

[0034] FIG. 1 is an exploded perspective view showing one embodiment of the processing liquid supply device of the present invention, and FIG. 2 is an assembled perspective view. In addition, FIG. 3 is a sectional view taken along line A-A of FIG. 2 . In addition, the front upper wing 251 and the front lower wing 351 are shown enlarged within the circle in FIG. 3 . Incidentally, these figures are all so-called schematic diagrams...

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Abstract

The invention provides a processing liquid feeder of a processing liquid recovery type which allows effective prevention of leakage of the processing liquid from the enclosure during processing of a substrate even when the upper and lower enclosures are made of a hydrophobic material and are long in both the width direction and the substrate-carrying direction. An upper wing 25 and a lower wing 35 are arranged on each outside surface of upper and lower nozzle blocks 22 and 32 arranged in the upper and lower enclosures, respectively, so as to protrude in the substrate-carrying direction and allow the substrate B to pass through. The upper and lower wings 25 and 35 are located so that the distance between their opposing surfaces is shorter than that between the opposing surfaces of the upper bottom plate 21 and the lower top plate 34.

Description

technical field [0001] The present invention relates to a liquid-saving treatment liquid used for wet processes such as cleaning, etching, development, and peeling of sheet-type substrates such as glass substrates used in various applications, including liquid crystal panels and other display panels. Improvements to the feeder. Background technique [0002] Conventionally, a processing liquid (cleaning liquid) supply device generally referred to as a processing liquid recovery type as described in Patent Document 1 is known. In this processing liquid supply device, a box-shaped upper casing and a lower casing are arranged facing each other, and a substrate processing path is formed between these upper and lower casings, and the substrate passes through the processing path. Further, the processing liquid is supplied to the substrate processing path from the downstream side of the upper and lower housings in the substrate transfer direction, and the processing liquid supplied...

Claims

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Application Information

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IPC IPC(8): B08B3/00H01L21/304
Inventor 竹市芳邦加藤博己村冈佑介
Owner FUTURE VISION
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