Method for adjusting machine set, manufacture control system and semiconductive manufacture system

Abstract

The invention relates to a producing control system, which comprises a test database, a detect database, an experiment design database (DOE), and a processor, wherein said test data stores at least one product test data; said detect database stores at least one machine detect data; said experiment design database (DOE) stores at least one process factor relation decided by the experiment design method; and said process via the preset target data and product test data decides one compensation valve, and via the compensation valve and machine detect data, the factor relation, decides the machine adjust data.

Description

technical field [0001] The invention relates to manufacturing control, in particular to a system and method for adjusting machine setting by using work-in-progress measurement data, machine monitoring data, and experimental design data. Background technique [0002] With the development of technology, the line width of IC components is getting smaller and smaller, which greatly improves the accuracy and cost of IC manufacturing. Whether the parameter setting of the manufacturing machine can be adjusted at any time to achieve optimization is one of the important reasons affecting the yield rate of IC manufacturing with small line width. [0003] Referring to FIG. 1 , it shows a schematic diagram of setting / adjustment of machine parameters in traditional IC manufacturing. In the traditional IC manufacturing process, before the IC product is processed by the machine 11, it is first measured on the first measuring machine 131 to obtain a pre-processing measurement value, which ...

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Problems solved by technology

Therefore, adjusting the machine parameters only based on the difference between the measured value before and after the processing of the product can not correct the manufacturing error caused by the drift of the operating state of the above-mentioned machine itself.

[0004] However, the process parameter setting and adjustment of traditional manufacturing machines do not take into account the drift of the above-mentioned machine operation status, and the IC yield rate is greatly reduced due to the inaccurate machine setting.

[0005] In short, traditional IC manufacturing does not fully take into account various factors affecting the process when setting machine process parameters, nor does it feed back errors caused by the operating status of the manufacturing machine itself to the process parameters. In terms of setting, the setting of the process parameters of the machine is not ideal, resulting in the phenomenon that the yield of IC is too low

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