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Acceleration sensor, electronic device comprising the same, and acceleration measuring method

An acceleration sensor and acceleration technology, applied in multi-dimensional acceleration measurement, velocity/acceleration/shock measurement, acceleration measurement using inertial force, etc., can solve the problem of inability to achieve miniaturization, difficulty in measuring high-precision acceleration, complex structure, etc. question

Inactive Publication Date: 2007-03-14
SAE MAGNETICS (HK) LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] However, in the method described in the above-mentioned prior art, it is necessary to set the signal for taking out the skew measurement on the cross-shaped supporting member (spring) itself or on its periphery. The electrodes used, such that their structure becomes complicated due to their circuit wiring
In addition, since the skew measuring element is mounted on the support member, it cannot be miniaturized
Furthermore, since the skew measuring element is installed or built into the spring part of the supporting member, it is difficult to measure the acceleration with high accuracy due to the influence of spring displacement.

Method used

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  • Acceleration sensor, electronic device comprising the same, and acceleration measuring method
  • Acceleration sensor, electronic device comprising the same, and acceleration measuring method
  • Acceleration sensor, electronic device comprising the same, and acceleration measuring method

Examples

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Embodiment 1

[0084] The first embodiment of the present invention will be described with reference to FIG. 1 to FIG. 10 . 1 to 2 show the structure of the acceleration sensor. 3 to 8 are explanatory diagrams showing the principle and method of acceleration measurement. FIG. 9 is a schematic diagram showing the structure of an acceleration sensor. FIG. 10 is a schematic diagram showing a modified example of the structure of the acceleration sensor.

[0085] [structure]

[0086] First, the structure of the acceleration sensor according to this embodiment will be described with reference to FIGS. 1 to 2 . As shown in FIG. 2A , the acceleration sensor related to this embodiment is roughly composed of three structures (A, B, and C). First, the first structure A provided on the upper part of the acceleration sensor will be described with reference to FIG. 1 . FIG. 1A shows a plan view thereof, and FIG. 1B shows a lower perspective view.

[0087] As shown in FIG. 1 , the first structure A i...

Embodiment 2

[0122] The second embodiment of the present invention will be described with reference to FIG. 11 to FIG. 12 . FIG. 11 shows a schematic structural view of a first structure including a pair of cantilever beams and a magnet according to this embodiment, FIG. 11A shows an upper perspective view, and FIG. 11B is a perspective view viewed from the inside. FIG. 12 shows a schematic diagram of the magnetic field measurement chip installed at this time.

[0123] As shown in FIG. 11 , a pair of cantilever beams 101 related to the present invention are arranged substantially on the same straight line, and fixed ends of the respective beams 111 and 112 face each other. In addition, each fixed end side is fixed by one plate-shaped supporting member 130 . Accordingly, the respective free ends of the respective beams 111, 112 are located on opposite sides. Thereby, the magnets 121 and 122 attached to the respective free ends can be arranged with a distance left between them. Furthermor...

Embodiment 3

[0127] Next, a third embodiment of the present invention will be described with reference to FIG. 13 to FIG. 18 . 13 to 15 show the measurement principle of the acceleration sensor related to this embodiment. 16 to 18 schematically show a part of the structure of the acceleration sensor.

[0128] In addition, in this embodiment, particularly, a U-shaped magnet is used as the above-mentioned magnet, and the magnetic field directions of the N-pole surface and the S-pole surface are measured by the resistance value, and the acceleration is obtained from the difference, so that the sensitivity can be improved. Next, the measurement principle of the acceleration related to this embodiment and the structure of the acceleration sensor will be described.

[0129] First of all, the basic measurement principle of the acceleration sensor related to this embodiment is the same as the above-mentioned embodiment 1 and embodiment 2, that is, the acceleration measurement chip is used to meas...

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Abstract

There is provided an acceleration sensor that is capable of detecting acceleration with high precision and capable of reducing the size and cost due to its simple structure. The acceleration sensor comprises: a pair of cantilevers arranged on a same straight line or almost in parallel in such a manner that positions of fixed ends and free ends are arranged to face in opposite directions from each other, and each of the free ends has a degree of freedom to deflect along a same direction; a pair of magnetic field generating devices mounted respectively to each of the free ends for generating magnetic fields; and a pair of magnetic field detecting devices arranged to face each of the magnetic field generating devices, respectively, for detecting directions of the magnetic fields generated by each of the magnetic field generating devices.

Description

technical field [0001] The invention relates to an acceleration sensor, in particular to an acceleration sensor for measuring acceleration based on changes in the direction of a magnetic field. Moreover, the present invention also relates to an electronic device installed with the acceleration sensor, and also relates to an acceleration measurement method. Background technique [0002] Conventionally, in order to measure the behavior of a predetermined object, an acceleration sensor that measures the acceleration of the object has been studied and used. It can be used in various fields such as the operating part of an industrial robot, an airbag device of an automobile, and a hard disk drive installed in a portable computer. Specifically, in a hard disk drive, it is used in order to measure and retract the magnetic head at the moment of abnormal movement or drop-off, etc., to suppress data destruction. Furthermore, in addition to free fall, an acceleration sensor is also r...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01P15/08G01P15/105G01P15/18
Inventor 笠岛多闻
Owner SAE MAGNETICS (HK) LTD