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Endurance testing apparatus of micro-structure crankle driven by parallel plate capacitance

A parallel plate capacitance and torsional fatigue technology, which is used in the testing of measuring devices, machine/structural components, and the use of stable torsional force to test the strength of materials. Easy-to-use, easy-to-obtain results

Inactive Publication Date: 2007-05-16
BEIJING UNIV OF TECH
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Problems solved by technology

[0004] Some current detection devices for the performance of MEMS structural materials mostly use comb drives for lateral electrostatic drive, so they can only simulate the working environment of MEMS structure stretching and bending. Due to the constraints of lateral drive, MEMS structures cannot be simulated. torsional force

Method used

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  • Endurance testing apparatus of micro-structure crankle driven by parallel plate capacitance
  • Endurance testing apparatus of micro-structure crankle driven by parallel plate capacitance
  • Endurance testing apparatus of micro-structure crankle driven by parallel plate capacitance

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Embodiment Construction

[0022] Specific embodiments of the present invention will be described below in conjunction with accompanying drawings 1-4.

[0023] There are three electrodes in this embodiment, wherein the driving electrode 1 is connected to an alternating current, and the bottom electrode layer 5 of the electrode and the first suspended plate 9 form a parallel-plate capacitive driver to realize the vertical driving of the first suspended plate 9 . The bottom electrode layer 6 of the detection electrode 2 and the second suspended parallel plate 10 constitute a parallel plate capacitive sensor, and the change of the distance between the second suspended plate 10 and the second bottom electrode 6 during the experiment is obtained by connecting an external amplitude detection circuit. That is, the change in capacitance. The ground electrode 11 is grounded. Cantilever beam samples 7 and 8 are cantilever beams on the central axis of the suspended plate, one end of which is connected to the fixe...

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Abstract

This invention relates to one parallel board capacitor drive micro structure fatigue test device, which comprises three electrodes, wherein, the drive one connected to alternating current to form parallel board drive tank through electrode bottom electrode layer and first hanging board to realize hanging board vertical drive; electrode bottom layer and second hanging parallel board form parallel capacitor sensor to get test distance changes between hanging board and bottom electrode; the third electrode is connected to earth.

Description

technical field [0001] The invention relates to a microstructure torsional fatigue experiment device driven by a parallel plate capacitance, which is used for the research on the fatigue characteristics of MEMS (Micro-Electro-Mechanical System, Micro Electro-Mechanical System) polysilicon structure under torsional stress environment, and belongs to the basis of micro-nano scale material properties Research areas. Background technique [0002] Micro Electro Mechanical System (MEMS), referred to as MEMS, is an emerging scientific field developed on the basis of microelectronics technology, integrating micro-machines, micro-sensors, micro-actuators, signal processing, and intelligent control. It combines the conventional integrated circuit technology with the unique special technology of micromachining, involving various engineering technologies and Discipline is a multidisciplinary comprehensive technology. [0003] In the past few decades, monocrystalline silicon and polycr...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N3/22G01M19/00G01M99/00
Inventor 尚德广贾冠华李立森王瑞杰孙国芹邓静刘豪
Owner BEIJING UNIV OF TECH
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