MEMS bending and twisting fatigue test device driven by parallel plate capacitor

A parallel-plate capacitance and torsional fatigue technology, which is used in the application of stable bending force to test the strength of materials, measurement devices, and testing of machine/structural components. Achieve the effect of shortening the experimental time and increasing the stress level

Inactive Publication Date: 2009-07-29
BEIJING UNIV OF TECH
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Problems solved by technology

[0004] At present, some detection devices for the performance of MEMS structural materials mostly use comb drives for lateral electrostatic drive, so they can only simulate single-phase stress working environments with simple MEMS structures. Due to the constraints of lateral drive, MEMS structures cannot be simulated. Simultaneous bending and torsion in a realistic stress environment

Method used

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  • MEMS bending and twisting fatigue test device driven by parallel plate capacitor
  • MEMS bending and twisting fatigue test device driven by parallel plate capacitor
  • MEMS bending and twisting fatigue test device driven by parallel plate capacitor

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Embodiment Construction

[0024] Combine below Figure 1~4 This embodiment will be described in detail.

[0025] figure 1 The first parallel plate capacitor 3, the second parallel plate capacitor 6, and the third parallel plate capacitor 12 are all composed of a suspended plate and a bottom electrode. The suspended plates 34, 35, 33 are the upper plates of the capacitors 3, 6, 12 respectively, and the bottom electrodes 2, 7, 9 are the lower plates of the capacitors 3, 6, 12 respectively. During the experiment, the suspended plates 34 , 35 , 33 are grounded through the grounding electrode 4 . The bottom electrodes 2 and 9 are respectively connected to an alternating current through the first driving electrode 1 and the second driving electrode 10 . Like this between the bottom electrode 2,9 and the suspended flat plate 34,33 just produce the electric field of change, make suspended flat plate 34,33 be subjected to the alternating electrostatic force of vertical direction, when the frequency of this e...

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Abstract

The invention is a MEMS bending torsion fatigue experiment device driven by a parallel plate capacitance, which belongs to the field of basic research on the properties of micro-nano scale materials. The device respectively realizes bending and torsional driving of the fatigue sample (5) through two parallel plate capacitive drivers (3, 12). One end of the fatigue sample (5) is connected to the ground electrode (4), and the other end is connected to the upper plate of the third parallel plate capacitor driver (12). One end of the vertical beam in the middle of the sample (5) is connected to the upper plate of the first parallel-plate capacitance driver (3), the other end is connected to the upper plate of the parallel-plate capacitance sensor, and the lower plate of the parallel-plate capacitance sensor passes through The detection electrode is connected to an external amplitude detection circuit to obtain the vibration amplitude of the sample in real time. The invention adopts two parallel plate capacitor drivers to respectively bend and twist the sample without affecting each other, and overcomes the disadvantage that the existing device can only simulate the single-phase stress working environment of the MEMS component.

Description

technical field [0001] The invention relates to a MEMS bending torsion fatigue experimental device driven by a parallel plate capacitance, which is used for the research on the fatigue characteristics of MEMS (Micro-Electro-Mechanical System, Micro Electro-Mechanical System) polysilicon structure in a multi-axial stress environment, and belongs to the characteristics of micro-nano scale materials field of basic research. Background technique [0002] MEMS (Micro Electromechanical System) refers to a micro-electromechanical system that integrates micro-sensors, actuators, signal processing and control circuits, interface circuits, communications and power supplies. To sum up, MEMS has the following basic characteristics, miniaturization, intelligence, multi-function, high integration and suitable for mass production. [0003] The technical basis of MEMS can be divided into the following aspects: 1. Design and simulation technology; 2. Materials and processing technology; 3. ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N3/20G01N3/08G01M19/00G01M99/00
Inventor 尚德广贾冠华李立森王瑞杰孙国芹邓静刘豪
Owner BEIJING UNIV OF TECH
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