Semiconductor integrated circuit
An integrated circuit and semiconductor technology, applied in the direction of semiconductor devices, circuits, semiconductor/solid device components, etc., can solve problems such as difficulty in ensuring capacitance, inability to form large capacitors, and inability to provide sufficient electrode area
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[0020] Various exemplary embodiments are described in detail below. FIG. 1 is a cross-sectional view showing a semiconductor integrated circuit according to an exemplary embodiment. As shown in FIG. 1, the semiconductor integrated circuit includes: a plurality of elements 2, such as MOSFETs, formed on the surface of a semiconductor substrate 1; and metal wiring layers, such as M1 and M2, for connecting the elements together to Make predetermined semiconductor integrated circuits work. These semiconductor integrated circuits are connected by metal wiring included in the metal wiring layer.
[0021] FIG. 1 shows a semiconductor integrated circuit having a multilayer wiring structure including a metal wiring layer M as the above-mentioned metal wiring layer 1 to M TOP . The top metal wiring layer (M TOP ) includes a plurality of top-layer power wirings extending in a first direction. directly on the top metal wiring layer M TOP The next top metal wiring layer below (M TOP...
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