Optical modulator with a traveling surface relief pattern
a technology of optical modulators and traveling surfaces, applied in the direction of optics, optical elements, instruments, etc., can solve the problems of network malfunction, voa output power drift, and the approach to building and maintaining network infrastructure cannot meet the requirements of reliability, efficiency and cost-effectiveness required by service providers
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[0029] With reference to FIG. 1A, an elastomer-based VOA device 10, which may be a variable optical attenuator according to concepts of the present application, is illustrated in simplified schematic form. The VOA device 10 is constructed with a bottom electrode configuration 12, comprising electrodes 12a-12n, on a glass substrate 14, a compliant layer 16 and a deformable top electrode 18 as shown in the figure. In one embodiment, the bottom electrode configuration 12 is patterned using known photolithography techniques in order to achieve a desired surface relief pattern on the upper surface 20 of the top electrode 18, the surface relief pattern corresponding to the system's grating structure. In this exemplary embodiment, the electrode configuration is an interdigitated pattern as illustrated in FIG. 1B. The compliant layer 16 may be a dielectric, elastomer or electrostrictive material, such as Poly-di-methyl-siloxane (PDMS) formed by known spin-coating or other manufacturing tech...
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