Particle-Reducing Load Lock Seal

Abstract

Modular wafer transport and handling facilities are combined in a variety of ways deliver greater levels of flexibility, utility, efficiency, and functionality in a vacuum semiconductor processing system. Various processing and other modules may be interconnected with tunnel-and-cart transportation systems to extend the distance and versatility of the vacuum environment. Other improvements such as bypass thermal adjusters, buffering aligners, batch processing, multifunction modules, low particle vents, cluster processing cells, and the like are incorporated to expand functionality and improve processing efficiency.

Description

RELATED APPLICATIONS[0001]This application is a continuation of U.S. application Ser. No. 11 / 679,829 filed on Feb. 27, 2007.[0002]The '829 application is a continuation-in-part of U.S. application Ser. No. 10 / 985,834 filed on Nov. 10, 2004 which claims the benefit of U.S. Prov. App. No. 60 / 518,823 filed on Nov. 10, 2003 and U.S. Prov. App. No. 60 / 607,649 filed on Sep. 7, 2004.[0003]The '829 application also claims the benefit of U.S. Prov. App. No. 60 / 777,443 filed on Feb. 27, 2006; U.S. Prov. App. No. 60 / 779,684 filed on Mar. 5, 2006; U.S. Prov. App. No. 60 / 779,707 filed on Mar. 5, 2006; U.S. Prov. App. No. 60 / 779,478 filed on Mar. 5, 2006; U.S. Prov. App. No. 60 / 779,463 filed on Mar. 5, 2006; U.S. Prov. App. No. 60 / 779,609 filed on Mar. 5, 2006; U.S. Prov. App. No. 60 / 784,832 filed on Mar. 21, 2006; U.S. Prov. App. No. 60 / 746,163 filed on May 1, 2006; U.S. Prov. App. No. 60 / 807,189 filed on Jul. 12, 2006; and U.S. Prov. App. No. 60 / 823,454 filed on Aug. 24, 2006.[0004]Each of the ...

AI Technical Summary

Benefits of technology

The patent text describes methods and systems for improving semiconductor manufacturing handling and transport. The invention combines modular wafer transport and handling facilities in a flexible and efficient way. The use of a robotic arm and other similar devices allows for greater flexibility and functionality in the vacuum environment. The text also describes various improvements such as bypass thermal adjusters, buffering aligners, low particle vents, and more. The technical effects of the invention include increased flexibility, efficiency, and functionality in semiconductor manufacturing processes.

Problems solved by technology

Cluster tools, machines that arrange a group of semiconductor processing modules in a radius about a central robotic arm, take up a large amount of space, are relatively slow, and, by virtue of their architecture, are limited to a small number of semiconductor process modules, typically a maximum of about five or six.

Linear tools, while offering much greater flexibility and the potential for greater speed than cluster tools, do not fit well with the current infrastructure of most current semiconductor fabrication facilities.

Moreover, linear motion of equipment components within the typical vacuum environment of semiconductor manufacturing leads to problems in current linear systems, such as unacceptable levels of particles that are generated by friction among components.

As semiconductor manufacturing has grown in complexity, it becomes increasingly necessary to transfer wafers among a number of different process modules or clusters of process modules, and sometimes between tools and modules that are separated by significant distances.

This poses numerous difficulties, particularly when wafers are transferred between separate vacuum processing facilities.

Transfers between vacuum environments, or between a vacuum and other processing environments often results in increased risk of particle contamination (due to the pumping and venting of wafers in load locks) as well as higher thermal budgets where wafers are either heated or cooled during transfers.

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