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Probe Card

Inactive Publication Date: 2008-06-26
TOKYO ELECTRON LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Benefits of technology

[0014]According to the present invention, contact of the probes and the inspection object is performed stably, and therefore, inspection with high accuracy and high reliability can be conducted.

Problems solved by technology

In this case, electrical contact of the circuit board and the contactor becomes unstable in the contactor surface, and inspection is not properly conducted.

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0030]Preferred embodiments of the present invention will now be described. FIG. 1 is a longitudinal sectional view showing the outline of a construction of an inside of a prober 1 mounted with a probe card according to this embodiment.

[0031]The prober 1 includes, for example, a probe card 2, a mounting table 3 for mounting a wafer W as an inspection object, and a card holder 4 which holds the probe card 2.

[0032]The probe card 2 is entirely formed into a substantially disk shape, for example. The probe card 2 includes a contactor 11 which supports a plurality of probes 10, a printed wiring board 13 as a circuit board which is electrically connected to the contactor 11 by an elastic sheet 12 as a contact element, and a reinforcing member 14 which reinforces the printed wiring board 13.

[0033]The contactor 11 is formed into a substantially square board shape, for example, and is disposed at a side of an under surface of the probe card 2 to be opposed to the mounting table 3. A pluralit...

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PUM

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Abstract

[OBJECT] Contact of a wafer and a probe is stabilized.[ORGANIZATION] A probe card includes a contactor supporting probes, and a printed wiring board electrically connected to the contactor. An elastic sheet is interposed between the contactor and the printed wiring board. The elastic sheet is formed so that elasticity in a central side is smaller than that in an outer peripheral side of the contactor. An elastic reaction force which acts on the contactor from the elastic sheet when the elastic sheet is compressed becomes weaker at the central part side as compared with the outer peripheral side of the contactor. Thereby, the bending amount of a central part of the contactor which is away from a fixed end and bends the most is reduced, and horizontality of the contactor is maintained.

Description

TECHNICAL FIELD[0001]The present invention relates to a probe card for inspecting electric characteristics of an inspection object such as a wafer.BACKGROUND ART[0002]Inspection of the electric characteristics of electronic circuits such as an IC and an LSI formed on, for example, semiconductor wafers is conducted by using a prober having a probe card. A probe card generally has a contactor which supports a number of probes, and a circuit board which is electrically connected to the contactor. The contactor is disposed so that an undersurface on which the probes are supported is opposed to a wafer, and the circuit board is disposed to be overlaid on a top surface side of the contactor so that electrical connection with the contactor is maintained. Inspection of the electric characteristics of a wafer is conducted by bringing a plurality of probes into contact with each of the electrodes of an electronic circuit on the wafer and transmitting an electrical signal for inspection to the...

Claims

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Application Information

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IPC IPC(8): G01R1/073
CPCG01R1/07364G01R1/07342H01L22/00
Inventor AMEMIYA, TAKASHIHOSAKA, HISATOMI
Owner TOKYO ELECTRON LTD