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Gradient assisted image resampling in micro-lithographic printing

a micro-lithographic printing and pixel data technology, applied in image enhancement, photomechanical treatment, instruments, etc., can solve the problems of complicated component sizing of the pattern processing system, significant difference in computational resources needed to process the pattern,

Inactive Publication Date: 2010-06-10
MICRONIC LASER SYST AB
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Benefits of technology

"The patent is about a way to extract pixels from an image that can be used in micro-lithography. It explains how the movement of a modulator across the image affects the extraction of these pixels. The technical effect of this invention is to improve the accuracy and precision of extracting pixels from an image, which can enhance the quality and efficiency of micro-lithography."

Problems solved by technology

Even though the number of pixels is constant, there may be a significant difference in computational resources needed to process the pattern.
Resource demands are heavily dependent on pattern, thus complicating component sizing of the pattern processing system.

Method used

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  • Gradient assisted image resampling in micro-lithographic printing
  • Gradient assisted image resampling in micro-lithographic printing
  • Gradient assisted image resampling in micro-lithographic printing

Examples

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Embodiment Construction

[0026]The following detailed description is made with reference to the figures. Preferred embodiments are described to illustrate the present invention, not to limit its scope, which is defined by the claims. Those of ordinary skill in the art will recognize a variety of equivalent variations on the description that follows.

[0027]The present disclosure relates to, gradient assisted image re-sampling, individual adjustments of pattern image per printed substrate by re-sampling and a data path architecture where pattern dependent processing and modulator dependent processing can be decoupled.

[0028]Data for a pixel-based exposure system that prints in a sequential manner needs to be “flat” (all data contributing to one pixel aggregated) and localized. The pattern represented as a rendered geometrical pixel map (GPM 121) fulfils these properties and makes a suitable format as intermediate storage.

[0029]A re-sampling process converts the GPM into modulator pixels in a modulator pixel map...

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Abstract

The present disclosure relates to the re-sampling of pixel data, with one application being micro-lithography. In particular, it relates to the extraction of modulator pixels from a rasterized image, as a function of how the modulator moves across the rasterized image.

Description

RELATED APPLICATION[0001]This application claims the benefit of U.S. Patent Provisional Application No. 61 / 200,967 filed 5 Dec. 2008. The provisional application is incorporated by reference. This application is related to U.S. Pat. No. 7,302,111 from application Ser. No. 09 / 954,721, entitled GRAPHICS ENGINE FOR HIGH PRECISION LITHOGRAPHY, filed 12 Sep. 2001, to U.S. patent application Ser. No. 11 / 736,490, entitled TRIANGULATING DESIGN DATA AND ENCODING DESIGN INTENT FOR MICROLITHOGRAPHIC PRINTING, filed 16 Apr. 2007 and to U.S. patent application Ser. No. 12 / 626,581 entitled IMAGE READING AND WRITING USING A COMPLEX TWO-DIMENSIONAL INTERLACE SCHEME, filed 25 Nov. 2009. This application is related to the US patent application entitled METHOD AND DEVICE USING ROTATING PRINTING ARM TO PROJECT OR VIEW IMAGE ACROSS A WORKPIECE, filed contemporaneously. These related applications are incorporated by reference.BACKGROUND OF THE INVENTION[0002]The present disclosure relates to the re-sampl...

Claims

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Application Information

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Patent Type & Authority Applications(United States)
IPC IPC(8): G06K9/36
CPCG03F7/70508G03F7/70291G03F7/704G06T5/80
Inventor IVANSEN, LARSOSTERBERG, ANDERS
Owner MICRONIC LASER SYST AB