Abrasive article with uniform height abrasive particles
a technology of abrasive particles and abrasives, which is applied in the direction of grinding devices, traffic signals, roads, etc., can solve the problems of nano-diamonds that are difficult to embed in the tin plate, preloads that exacerbate scratches on the slider bars, and current processes that are economically wasteful
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[0046]FIG. 5 illustrates fixture 100 for making a substantially uniform height diamond charged abrasive article in accordance with a method of the present invention. Master plate 102 is machined and polished to a substantially flat surface 104.
[0047]Roughness of a surface can be measured in a number of different ways, including peak-to-valley roughness, average roughness, and RMS roughness. Peak-to-valley roughness (Rt) is a measure of the difference in height between the highest point and lowest point of a surface. Average roughness (Ra) is a measure of the relative degree of coarse, ragged, pointed, or bristle-like projections on a surface, and is defined as the average of the absolute values of the differences between the peaks and their mean line.
[0048]The master plate 102 is preferably silicon, since wafer planarization infrastructure is capable of achieving a very smooth surface with small waviness values in the order of 1 nm and 100 nm, respectively. The fine finish requireme...
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