Wafer level diode package structure
a diode and package technology, applied in the direction of semiconductor devices, electrical apparatus, semiconductor/solid-state device details, etc., can solve the problems of poor electric conductivity of the prior art, increased etc., and achieve good electric conductivity of the present invention, material cost and manufacturing cost reduction
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first embodiment
[0035]Referring to FIGS. 2, 2A1-2I1 and 2I2, the present invention provides a method for making a wafer level vertical diode package structure. The method includes the following steps:
[0036]The step S100 is: referring to FIGS. 2, 2A1 and 2A2 (FIG. 2A1 is a partial cross-sectional view of FIG. 2A2), providing a diode wafer Wa that has a first semiconductor unit Pa and a second semiconductor unit Na connected with a bottom side of the first semiconductor unit Pa. In addition, the first semiconductor unit Pa can be a P-type semiconductor layer and the second semiconductor unit Na can be an N-type semiconductor layer; Alternatively, the first semiconductor unit Pa can be an N-type semiconductor layer and the second semiconductor unit Na can be a P-type semiconductor layer, according to different requirements.
[0037]The step S102 is: referring to FIGS. 2, 2B1 and 2B2 (FIG. 2B2 is a partial top view of FIG. 2B1), forming a plurality of grooves Ga interlaced with each other and passing thro...
fifth embodiment
[0060]Referring to FIGS. 4, 4A-4I1 and 4I2, the present invention provides a method for making a wafer level vertical diode package structure. The method includes the following steps:
[0061]The step S200 is: referring to FIGS. 4 and 4A, providing a diode wafer We that has a first semiconductor unit Pe and a second semiconductor unit Ne connected with a bottom side of the first semiconductor unit Pe. In addition, the first semiconductor unit Pe can be a P-type semiconductor layer and the second semiconductor unit Ne can be an N-type semiconductor layer; Alternatively, the first semiconductor unit Pe can be an N-type semiconductor layer and the second semiconductor unit Ne can be a P-type semiconductor layer, according to different requirements.
[0062]The step S202 is: referring to FIGS. 4 and 4B, forming a plurality of first grooves G1e interlaced with each other and passing through the first semiconductor unit Pe and one part of the second semiconductor unit Ne.
[0063]The step S204 is:...
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