Door opening and closing apparatus, transfer apparatus, and storage container opening method

Abstract

A door opening and closing apparatus includes: a frame that structures part of a wall surface of a transfer room and is provided with an opening for opening the transfer room; a door part capable of opening and closing the opening: a placing pedestal on which a storage container can be placed; a chamber provided at a position on the transfer room side so as to face the opening, and having an inner space to be subjected to a purge process with an environmental gas; and a pressure adjusting part causing the inner space of the chamber and the inner space of the storage container to communicate with each other using a route other than the opening. The door opening and closing apparatus can be applied to a wafer transfer apparatus or the like.

Description

BACKGROUND OF THE INVENTION[0001](1) Field of the Invention[0002]The present invention relates to a door opening and closing apparatus having a chamber disposed in an adjacent transfer room, a transfer apparatus having the door opening and closing apparatus, and a storage container opening method.[0003](2) Description of Related Art[0004]In a semiconductor manufacturing process, wafers are processed in a clean room for improving yields and quality. However, with today's highly integrated devices, miniaturized circuitry, and wafers of increased sizes, it has been becoming difficult to manage fine dust in the entire clean room, in terms of both costs and techniques. Therefore, in recent years, “the minienvironment system” is employed replacing the method for improving the cleanliness of the entire clean room. In the minienvironment system, the cleanliness of only a local space around wafers is improved, and processes of transferring wafers and others are performed. In the minienvironm...

AI Technical Summary

Benefits of technology

The present invention provides a door opening and closing apparatus for a storage container that allows for smooth and proper opening without the need to stop the purge process on the inner space of the chamber. The apparatus eliminates the pressure difference between the inner space of the chamber and the storage container, reducing the force required for shifting the door part and opening the inner space of the chamber. The apparatus also prevents particles from rising, displacement of transfer target objects, and failure of the door and lid parts associated with the opening process. Additionally, the apparatus allows for the use of existing nozzles for the purge process, reducing the number of components and costs. The storage container opening method using the apparatus ensures that the pressure difference between the chamber and the storage container is eliminated, and the opening process is performed smoothly and properly.

Problems solved by technology

However, with today's highly integrated devices, miniaturized circuitry, and wafers of increased sizes, it has been becoming difficult to manage fine dust in the entire clean room, in terms of both costs and techniques.

Further, when the pressure of the inner space of the chamber becomes higher than the pressure of the inner space of the storage container, the force acting in the direction pressing the door part against the storage container becomes great.

As a result, there arises a problem that the storage container opening process cannot be smoothly and properly carried out, or the door part and the lid part cannot be shifted at all, making it impossible to open the inner space of the storage container.

Provided that the door part is forcibly shifted under such conditions and the storage container opening process is carried out, the shock of the process causes the entire door opening and closing apparatus to wobble or vibrate.

Further, forcible execution of the storage container opening process may invite failure or damage of the door part or the lid part.

However, there is no denying that a reduction in the processing efficiency is invited by the temporary stop of the purge process on the inner space of the chamber.

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