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Vacuum pump, protective net, and contact part

a vacuum pump and protective net technology, applied in the field of protective nets, to achieve the effect of increasing the height (length) of the vacuum pump

Pending Publication Date: 2021-11-18
EDWARDS JAPAN
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Benefits of technology

The present invention is a vacuum pump that has a small height and is designed to bring the rotating body and protective net as close as possible. The rotating body actively supports the protective net, which prevents the net from getting caught in the rotating body and reduces the distance between them. This results in a vacuum pump that is more compact and efficient.

Problems solved by technology

Such configuration of the prior art is against the demand of a user demanding for a vacuum pump that is designed to be as compact as possible without compromising the exhaust performance thereof.

Method used

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  • Vacuum pump, protective net, and contact part
  • Vacuum pump, protective net, and contact part
  • Vacuum pump, protective net, and contact part

Examples

Experimental program
Comparison scheme
Effect test

first embodiment

[0051]FIG. 1 is a diagram showing an example of a schematic configuration of the vacuum pump 1 according to the present invention, the diagram showing a cross section of the vacuum pump 1 taken along an axial direction thereof.

[0052]Note that, for the sake of convenience, the embodiments of the present invention each describe a direction of a diameter of each rotor blade as “radial (diameter / radius) direction” and a direction perpendicular to the direction of the diameter of each rotor blade as “axial direction”.

[0053]A casing (outer cylinder / case) 2 configuring a housing of the vacuum pump 1 has a substantially cylindrical shape and constitutes a case of the vacuum pump 1 together with a base 3 provided in a lower portion of the casing 2 (at an outlet port 6 side). A gas transfer mechanism, which is a structure bringing about an exhaust function of the vacuum pump 1, is accommodated in the case.

[0054]In the present embodiment, the gas transfer mechanism is composed of a rotating bo...

embodiment 1

[0072] A contact point of the rotating body (shaft 7 or rotor 8) is configured to have a small resistance

[0073]FIGS. 2A and 2B are diagrams for explaining an embodiment in which a contact point of the shaft 7 that comes into contact with the protective net 100 is shaped to have a small resistance.

[0074]In the embodiment shown in FIGS. 2A and 2B, a tip portion of the shaft 7 that comes into contact with the protective net 100 when the protective net 100 becomes deformed and comes into contact with the shaft 7, is shaped to have a small resistance, thereby supporting the protective net 100 and preventing the protective net 100 from being caught in the shaft 7.

[0075]In FIG. 2A, a tip portion 72 of the shaft 7 is in a spherical shape. In FIG. 2B, a tip portion 74 of the shaft 7 is round-chamfered.

[0076]FIGS. 3A and 3B are diagrams for explaining an embodiment in which a contact point of the rotor 8 that comes into contact with the protective net 100 is shaped to have a small resistance....

embodiment 2

[0079] A hole is formed in the protective net 100, and the protective net 100 is supported when in contact with the rotating body

[0080]FIG. 4 is a diagram for explaining an embodiment that forms a hole in the protective net 100 and supports the protective net 100 by bringing the protective net 100 into contact with the rotating body.

[0081]In this embodiment, a hole is formed beforehand on a part of the protective net 100 that comes into contact with a protrusion 75 of the shaft 7 or a protrusion 85 of the rotor 8. When the protective net 100 becomes deformed, the protrusion 75 of the shaft 7 and the protrusion 85 of the rotor 8 immediately comes into contact with the hole of the protective net 100 to support the deformation of the protective net 100.

[0082]FIG. 4A is a diagram showing an example in which the tapered protrusion 75 is provided on the shaft 7, to support the protective net 100 by coming into contact with the hole of the protective net 100.

[0083]FIG. 4B is a diagram show...

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Abstract

A vacuum pump that is small in height (length) is configured to bring a rotating body and a protective net as close to each other as possible by causing the rotating body to actively support the protective net. The vacuum pump is provided with a mechanism that causes a rotating body (a shaft or a rotor) to actively support a protective net when the protective net becomes deformed (bent) toward the vacuum pump side due to a change in pressure or temperature of the vacuum pump. Specifically, instead of preventing the protective net from being caught in the rotating body by increasing the distance therebetween, the entanglement of the protective net is prevented by actively supporting the protective net by bringing the protective net and the rotating body closer to each other. Accordingly, the height (length) of the vacuum pump can be reduced more.

Description

CROSS-REFERENCE OF RELATED APPLICATION[0001]This application is a Section 371 National Stage Application of International Application No. PCT / JP2019 / 041795, filed Oct. 24, 2019, which is incorporated by reference in its entirety and published as WO 2020 / 090633 A1 on May 7, 2020 and which claims priority of Japanese Application No. 2018-204847, filed Oct. 31, 2018.BACKGROUND OF THE INVENTION[0002]The present invention relates to a protective net provided at an inlet port of a vacuum pump, and to a technique for preventing the protective net from being caught in a rotating body when, for example, the pressure inside the vacuum pump changes significantly, by providing, between the rotating body and the protective net, a portion where the rotating body and the protective net come into contact with each other and that holds the protective net.[0003]In a vacuum pump 1 such as a turbomolecular pump or a thread groove pump, a protective net 100 for preventing foreign matter from entering th...

Claims

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Application Information

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Patent Type & Authority Applications(United States)
IPC IPC(8): F04D29/70
CPCF04D29/701F04D13/06F04D19/04F04D1/00F04C2220/10F04C2240/80F04C29/12F04C2230/91F04C2240/20
Inventor YAMAGUCHI, TOSHIKI
Owner EDWARDS JAPAN