Pillar cell flash memory technology

a technology of flash memory and pillar cell, which is applied in the direction of solid-state devices, instruments, semiconductor devices, etc., can solve the problems of prohibitive power consumption of sup>2/sup>*f, and achieve the effect of improving programming characteristics
US7049652B2Active Publication Date: 2006-05-23SANDISK TECH LLC
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Patent Information

Authority / Receiving Office
US · United States
Patent Type
Patents(United States)
Current Assignee / Owner
SANDISK TECH LLC
Publication Date
2006-05-23

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Abstract

An array of a pillar-type nonvolatile memory cells (803) has each memory cell isolated from adjacent memory cells by a trench (810). Each memory cell is formed by a stacking process layers on a substrate: tunnel oxide layer (815), polysilicon floating gate layer (819), ONO or oxide layer (822), polysilicon control gate layer (825). Many aspects of the process are self-aligned. An array of these memory cells will require less segmentation. Furthermore, the memory cell has enhanced programming characteristics because electrons are directed at a normal or nearly normal angle (843) to the floating gate (819).
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Description

BACKGROUND OF THE INVENTION

[0001] The present invention relates to nonvolatile erasable programmable memories and more specifically, structures and fabrication techniques for a pillar structure memory cell storage element.

[0002] Memory and storage is one of the key technology areas that is enabling the growth in the information age. With the rapid growth in the Internet, World Wide Web (WWW), wireless phones, personal digital assistants (PDAs), digital cameras, digital camcorders, digital music players, computers, networks, and more, there is continually a need for better memory and storage technology.

[0003] A particular type of memory is nonvolatile memory. A nonvolatile memory retains its memory or stored state even when power is removed. Some types of nonvolatile erasable programmable memories include as Flash, EEPROM, EPROM, MRAM, FRAM, ferroelectric, and magnetic memories. Some nonvolatile storage products include CompactFlash (CF) cards, MultiMedia cards (MMC), secure digital (SD...

Claims

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