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Holding device and exposure apparatus using the same

a technology of holding device and exposure apparatus, which is applied in the direction of mountings, instruments, optics, etc., can solve the problems of affecting the reproducibility of distortion to be produced in the subject member, affecting the and requiring a large increase in production costs, so as to achieve good reproducibility of initial distortion and good positioning. reproducibility

Inactive Publication Date: 2008-04-01
CANON KK
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Benefits of technology

The solution significantly reduces distortion caused by external forces and temperature changes, enhancing the reproducibility of the optical member's positioning and maintaining optical performance by utilizing rolling friction, which is lower than static friction, thus reducing production costs and maintaining high precision.

Problems solved by technology

This requires a large increase of production cost.
As a result, frictional forces, which are attributable to the mounting method, such as the order of contact of the three spherical members or the relative speed upon mounting, would remain in the contact points, causing degradation of reproducibility of distortion to be produced in the subject member 10 when it is mounted.
With regard to the holding device disclosed in Japanese Laid-Open Patent Application, Publication No. 2004-78209, mentioned above, even if the spherical surface being protruded from the V-shaped recess is provided by a rolling mechanism, similar inconveniences mentioned above will be caused in relation to the external force or frictional force in any direction other than the direction along the radial direction of the holding member.

Method used

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  • Holding device and exposure apparatus using the same
  • Holding device and exposure apparatus using the same
  • Holding device and exposure apparatus using the same

Examples

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Effect test

first embodiment

[0036]FIGS. 1A and 1B show a holding device 100A according to a first embodiment of the present invention, wherein FIG. 1A illustrates a general structure of the holding device 100A and FIG. 1B is a view as seen in the direction of an arrow A in FIG. 1A.

[0037]The holding device 100A is arranged to hold an optical element 110, which is the subject member to be held. The optical element 110 has arms 111 to be held by the holding mechanism and having approximately V-shaped protrusions. Each arm 111 is disposed in a radial direction from the center O of the optical element 110. In this embodiment, three arms 111 are provided approximately at a pitch of one hundred twenty degrees.

[0038]On the other hand, there is a holding member that comprises a base 120 and holding portions 121, each having an approximately V-shaped recess. Similarly to the arms 111, the holding portions 121 are disposed in radial directions from the center O and at a pitch of approximately one hundred twenty degrees. ...

second embodiment

[0044]FIGS. 2A, 2B and 2C show a holding device 100B according to a second embodiment of the present invention, wherein the rolling element 131A of the holding device 100A of the first embodiment is replaced by a rolling-element unit 131B that comprises a plurality of balls. FIG. 2A shows a general structure, and FIG. 2B is a view as seen in the direction of an arrow B in FIG. 2A. FIG. 2C shows details of the rolling-element unit 131B. Although in FIGS. 2A and 2B each rolling-element unit 131B is fixedly mounted on the flat surface 122 (124) of the holding portion 121, it may be fixed to the flat surface 112 (114) of the arm 111 to be held by the mechanism.

[0045]As best seen in FIG. 2C, the rolling-element unit 131B comprises a member 132 having a spherical recess 132B, a ball element 133, and a plurality of small balls 134. Thus, a large number of small balls 134 are disposed between the spherical recess 132B and the ball element 133, such that the ball element 133 can rotate freel...

third embodiment

[0049]FIGS. 3A and 3B show a holding device 100C according to a third embodiment of the present invention, wherein the rolling element 131A of the holding device 100A of the first embodiment is replaced by rolling-element unit 131C that comprises a pair of orthogonal rollers 135 and 137 and a flat plate 136 disposed between these rollers. FIG. 3A shows a general structure, and FIG. 3B is a view as seen in the direction of an arrow C in FIG. 3A.

[0050]Each roller 135 is in line-contact with the flat surface 112 (114) of the arm and with the flat plate 136. Furthermore, each roller 137 is in line-contact with the flat surface 122 (124) of the holding portion and with the flat plate 136. In this manner, the optical element 110 is supported through the rollers. Hence, as compared with the holding portions 101A and IOIB of the preceding embodiments, this embodiment has a feature of higher rigidity holding.

[0051]The arm 111 to be held by the mechanism is confined relatively to the holding ...

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PUM

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Abstract

A holding device including an object to be held by the holding device and having six first flat surfaces, a holding member having six second flat surfaces each being opposed to and parallel to a corresponding one of the first flat surfaces, wherein the holding member has three holding portions of one of a protruded shape and a recessed shape, and wherein two of the second flat surfaces define at least a portion of the protruded shape or recessed shape of the holding portions, and rolling elements each being provided between associated ones of the first and second flat surfaces. The object is supported by the holding member through the rolling elements.

Description

FIELD OF THE INVENTION AND RELATED ART[0001]This invention relates to a holding device for holding an object with good reproducibility and an exposure apparatus using such a holding device.[0002]A mechanism called a “kinematic mount” is known as a device for holding an object. An advantageous feature of such a kinematic mount is small distortion to be produced in the member held by it. Another advantageous feature is that the member can be demounted and then re-mounted while keeping the positioning precision of the member held by it.[0003]FIG. 9 shows a structural example of such a kinematic mount. The holding mechanism shown at 1A in FIG. 9 comprises a holding member 20A, a subject member 10 to be held by the holding mechanism and including three legs 11, and spherical members 12a, 12b and 12c provided at free ends of the three legs 11, respectively. The holding member 20A is formed with a conical recess 21 and a V-shaped recess 22. By the contact between the conical recess 21 and ...

Claims

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Application Information

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Patent Type & Authority Patents(United States)
IPC IPC(8): G02B7/02
CPCG02B7/008H01L21/683
Inventor MAKINO, RYOTATAKABAYASHI, YUKIO
Owner CANON KK