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Water jet processing method

a technology of water jets and processing methods, applied in the field of water jet processing methods, can solve the problem of unlikely bounce of processing water, and achieve the effect of preventing abnormal processing and damag

Active Publication Date: 2009-09-08
DISCO CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Benefits of technology

The present invention provides a water jet processing method that prevents abnormal processing and damage when cutting lines intersect. The method includes a first cutting step for forming a first cut line and a second cutting step for cutting a second predetermined cutting line. The water jet is directed to the workpiece along the first cut line and the second cutting line to cut the first and second lines. The relative movement of the nozzle and the holding means is set to a first speed during the first cutting step and a second speed lower than the first speed during the second cutting step. The second cutting step is performed at a lower speed to prevent bounce of the processing water and damage to the vicinity of the opening of the second cutting line. The method reduces the likelihood of insufficient processing areas and produces satisfactory products.

Problems solved by technology

Thus, the bounce of the processing water is unlikely to occur.

Method used

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Examples

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working example

[0060]A glass epoxy plate with a thickness of 3 mm is cut in a cross shape by the same water jet processing machine as that illustrated in FIG. 2. Initially, a first predetermined cutting line to be cut first was cut by water jet emitted from a nozzle at a relative travel speed of 35 mm / sec. Incidentally, it was grasped that an angle θ of delay-inclination occurring at this time as shown in FIG. 3B was about 14.5° and the distance d is about 0.8 mm. Next, a second predetermined cutting line crisscross intersects the first cut lines thus formed was cut at 35 mm / sec at a portion thereof immediately anterior to the intersection. When a position to within 0.9 mm of the first cut line is reached, the relative travel speed of the nozzle is decelerated to 3 mm / sec and the intersection is traversed to form a second cut line.

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Abstract

In a water jet processing method, when a nozzle adapted to emit water jet is moved relatively to a substrate to form a second cut line intersecting a first cut line, the relative travel speed of the nozzle is set to a second speed lower than a first normal speed by about 1 / 5 to 1 / 20 at least in a section anteroposterior to the intersection. Delay-inclination of a front edge of the second cut line is eliminated as much as possible to thereby prevent the occurrence of an insufficient processing area.

Description

BACKGROUND OF THE INVENTION[0001]1. Field of the Invention[0002]The present invention relates to water jet processing methods of cutting a platelike workpiece made of a relatively brittler material by producing a jet of high-pressure processing water directed to the workpiece. In particular, the invention relates to such a water jet processing method in the case where cutting lines are intersected with each other.[0003]2. Description of the Related Art[0004]Substrates mounted thereon with e.g. a semiconductor device are frequently made of a brittle material such as glass epoxy, glass composite or the like. The glass epoxy is made by impregnating an epoxy resin into a stack of glass fiber-made fabrics. The glass composite is made by impregnating an epoxy resin into a stack of cut and trimmed glass fibers. Such brittle substrates are obtained by cutting one large material in a lattice pattern. The water jet mentioned above in which high-pressure processing water is jetted to a workpie...

Claims

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Application Information

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Patent Type & Authority Patents(United States)
IPC IPC(8): B24C1/00
CPCB26F3/004B24C1/00Y10T83/04
Inventor KANAI, SHIGEKAZUHANAJIMA, SATOSHI
Owner DISCO CORP
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