The invention relates to the technical field of
perovskite solar cell film preparation, in particular to a formamidino
halide material cold deposition
coating device and method.The formamidino
halide material cold deposition
coating device comprises a shell, an
evaporation source and a substrate support, the
evaporation source and a substrate are both located in the shell, a heating belt is embedded in the shell, the
evaporation source is arranged in the center of the shell, and the substrate support is arranged on the substrate support; the heating belt and the evaporation source are subjected to
temperature control in an independent
electric heating mode; the substrate support is arranged around the evaporation source according to the design position of the cavity; a cooling structure is arranged in the substrate support, substrate clamps are arranged on the two faces of the substrate support, a substrate is fixed to the substrate clamps, and a rotating structure is arranged at the bottom of the substrate support. The interior of the shell further communicates with a
vacuum pump. During use, the temperature of the shell is higher than that of the substrate support. According to the method, the formamidino
halide material in a dispersed state is most easily deposited in a low-temperature region, and the preferential deposition and accurate control of the formamidino halide material can be realized by designing a variable-temperature and rotatable substrate device.