SAW sensor device using slit acoustic wave and method thereof
A technology of sensor devices and slits, applied in measuring devices, instruments, measuring fluid pressure through electromagnetic components, etc., can solve problems such as influence
Inactive Publication Date: 2007-09-05
LG INNOTEK CO LTD
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[0011] It is known that the limit on the minimum value of the resonant frequency range is determined by the size of the device, and that the limit on its maximum value is affected by the line width of the electrode and the loss of the electric wave
Method used
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no. 2 example
[0052] 3 is a schematic cross-sectional view illustrating a SAW sensor device operated as a liquid sensor by using slit acoustic waves according to a second embodiment of the present invention.
[0053] As described in FIG. 3 , the SAW sensor device operated as a liquid sensor includes a piezoelectric medium 301 having a narrow slit 304 inside which slit acoustic waves pass, and is divided from the narrow slit 304 into an upper and the lower part; an input IDT 302 formed on one side of the piezoelectric medium 301 for converting an electrical input signal into a slit acoustic wave; an output IDT 303 formed on the opposite side of the piezoelectric medium 301 to the input IDT 302 One side for receiving the propagated slit acoustic wave and converting the wave into an electrical signal; an input liquid port 305 for inputting liquid into the narrow slit 305 of the piezoelectric medium 301; and an output liquid port 306 for using The liquid in the narrow slit 304 of the output pie...
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The present invention discloses an SAW sensor device using a slit acoustic wave and a method thereof. The SAW sensor device using the slit acoustic wave includes a piezoelectric medium having a thin membrane at its one portion, a medium at the other portion, and a narrow slit which the slit acoustic wave passes through at its inside, an input IDT formed at the outer portion in the narrow slit of the piezoelectric medium, for transducing an electric input signal into the slit acoustic wave, and an output IDT formed at the outer portion opposite to the input IDT, for receiving the propagated slit acoustic wave and transducing the wave into an electric signal, whereby an external pressure transmitted to the device is sensed. The SAW sensor device using the slit acoustic wave and the method thereof can obtain intensity of the external pressure and viscosity and dielectric permittivity of liquid passing through the narrow slit by using correlations of frequency and velocity shifts of the slit acoustic wave generated in a resonator of the narrow slit.
Description
technical field [0001] The present invention relates to a surface acoustic wave (SAW) device, and more particularly, to a SAW sensor device using a slit acoustic wave, which can be achieved by using the frequency of the slit acoustic wave generated in a resonator and Correlation of velocity offset such as sensing the intensity of external pressure and the viscosity and dielectric constant of liquid using surface acoustic waves generated in a resonator of a SAW device; and methods thereof. Background technique [0002] Recently, mobile communication devices such as cellular phones and portable information terminals have been rapidly popularized due to the development of mobile communication systems. As such, there is an increasing demand for miniaturization and high performance of devices and their components. In addition, two types, ie, analog and digital type wireless communication systems, are used for cellular phones, and frequencies used for wireless communication vary ...
Claims
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IPC IPC(8): G01L9/00
CPCG01L9/0025
Inventor 瓦连京·切列德尼克米哈伊尔·德弗舍尔斯托夫崔用林
Owner LG INNOTEK CO LTD