Comprehensive utilization method of by-product for poycrystalline silicon production process
A production process and by-product technology, applied in the field of comprehensive utilization of by-products in the polysilicon production process, can solve the problems of limited dosage, incomplete utilization, and little research on the comprehensive utilization of polysilicon industry by-products.
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Embodiment 1
[0039] Polysilicon by-products are vaporized at 100-120°C, in molar ratio n 多晶硅副产物 / n 氢气 / n 空气 The mixing ratio of =1 / 2.2 / 4.5 is fully mixed with hydrogen and air at a temperature of 120-140°C after preheating, and then continuously and stably transported to the nozzle for high-temperature hydrolysis reaction. Control the temperature in the deacidification furnace to 540°C, and the temperature of the deacidification medium to 160°C. The quality index of the prepared silica is:
[0040] Silica content (%) 99.90
[0041] Primary particle average size (nm) 18
[0042] Specific surface area (m 2 / g) 160
[0043] pH value (4% suspension) 4.18
Embodiment 2
[0045] Polysilicon by-products are vaporized at 100-120°C, in molar ratio n 多晶硅副产物 / n 氢气 / n 空气 =1 / 2.4 / 5 The mixing ratio is fully mixed with hydrogen and air at a temperature of 120-140°C after preheating, and then continuously and stably delivered to the nozzle for high-temperature hydrolysis reaction. Other processing parameters are identical with embodiment 1, the silicon dioxide quality index of making:
[0046] Silica content (%) 99.86
[0047] Primary particle average particle size (nm) 14
[0048] Specific surface area (m 2 / g) 195
[0049] pH value (4% suspension) 4.02
Embodiment 3
[0051] The by-product of silane coupling agent is vaporized at 100-120°C, in molar ratio n 多晶硅副产物 / n 氢气 / n 空气 The mixing ratio of =1 / 2.4 / 5.2 is fully mixed with hydrogen and air at a temperature of 120-140°C after preheating, and then continuously and stably transported to the nozzle for high-temperature hydrolysis reaction. Other processing parameters are identical with embodiment 1, the silicon dioxide quality index of making:
[0052] Silica content (%) 99.83
[0053] Primary particle average particle size (nm) 20
[0054] Specific surface area (m 2 / g) 146
[0055] pH value (4% suspension) 4.10
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