Comprehensive utilization method of by-product for poycrystalline silicon production process

A production process and by-product technology, applied in the field of comprehensive utilization of by-products in the polysilicon production process, can solve the problems of limited dosage, incomplete utilization, and little research on the comprehensive utilization of polysilicon industry by-products.

Active Publication Date: 2008-02-20
HUBEI HUIFU NANOMATERIAL CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0017] There are not many studies on the comprehensive utilization of by-products of the polysilicon industry. The traditional method is to purify silicon tetrachloride in the by-products, and then use an esterification reaction with absolute ethanol (or methanol) to prepare ethyl silicate at normal temperature and pressure. (or methyl silicate), but the amount is very limited, and some still have difficulties such as separation, so they cannot be fully utilized

Method used

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  • Comprehensive utilization method of by-product for poycrystalline silicon production process
  • Comprehensive utilization method of by-product for poycrystalline silicon production process
  • Comprehensive utilization method of by-product for poycrystalline silicon production process

Examples

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Effect test

Embodiment 1

[0039] Polysilicon by-products are vaporized at 100-120°C, in molar ratio n 多晶硅副产物 / n 氢气 / n 空气 The mixing ratio of =1 / 2.2 / 4.5 is fully mixed with hydrogen and air at a temperature of 120-140°C after preheating, and then continuously and stably transported to the nozzle for high-temperature hydrolysis reaction. Control the temperature in the deacidification furnace to 540°C, and the temperature of the deacidification medium to 160°C. The quality index of the prepared silica is:

[0040] Silica content (%) 99.90

[0041] Primary particle average size (nm) 18

[0042] Specific surface area (m 2 / g) 160

[0043] pH value (4% suspension) 4.18

Embodiment 2

[0045] Polysilicon by-products are vaporized at 100-120°C, in molar ratio n 多晶硅副产物 / n 氢气 / n 空气 =1 / 2.4 / 5 The mixing ratio is fully mixed with hydrogen and air at a temperature of 120-140°C after preheating, and then continuously and stably delivered to the nozzle for high-temperature hydrolysis reaction. Other processing parameters are identical with embodiment 1, the silicon dioxide quality index of making:

[0046] Silica content (%) 99.86

[0047] Primary particle average particle size (nm) 14

[0048] Specific surface area (m 2 / g) 195

[0049] pH value (4% suspension) 4.02

Embodiment 3

[0051] The by-product of silane coupling agent is vaporized at 100-120°C, in molar ratio n 多晶硅副产物 / n 氢气 / n 空气 The mixing ratio of =1 / 2.4 / 5.2 is fully mixed with hydrogen and air at a temperature of 120-140°C after preheating, and then continuously and stably transported to the nozzle for high-temperature hydrolysis reaction. Other processing parameters are identical with embodiment 1, the silicon dioxide quality index of making:

[0052] Silica content (%) 99.83

[0053] Primary particle average particle size (nm) 20

[0054] Specific surface area (m 2 / g) 146

[0055] pH value (4% suspension) 4.10

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Abstract

The invention discloses a method for synthetically utilizing by-product in polycrystalline silicon producing course, vaporizing the by-product, preparing highly pure nano silicon dioxide with low chlorine content by high temperature hydrolyzation reaction, where the prepared silicon dioxde powder has primary grain size of 7-40 nm, specific surface area of 100-400 m2 / g, and pH value of 3.6-4.5, and silicon dioxide content above 99.8%, and can be widely applied to organic silicon, rubber, plastics, paint, and electronics, and other fields, playing the role in reinforcing, thickening, thixotropic property, antisettling, etc.

Description

technical field [0001] The invention relates to a comprehensive utilization method of by-products in the production process of polysilicon. Background technique [0002] Polysilicon material is an electronic material that is purified to a certain degree of purity after a series of physical and chemical reactions to purify industrial silicon. It is an extremely important intermediate product in the silicon industry chain. It is the most basic raw material for information industry and new energy industry. According to the classification of purity, polysilicon can be divided into metallurgical grade (industrial silicon), solar grade and electronic grade. [0003] 1. Metallurgical grade silicon (MG): It is made of silicon oxide reduced by carbon in an electric arc furnace. Generally, the content of Si is more than 90-95%, and some are as high as more than 99.8%. [0004] 2. Solar grade silicon (SG): The purity is between metallurgical grade silicon and electronic grade silico...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C01B33/113C01B33/18
Inventor 刘莉王跃林龙成坤吴利民
Owner HUBEI HUIFU NANOMATERIAL CO LTD
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