Contact needle for surface topography measuring and its preparing method
A technology of surface topography measurement and stylus, which is applied in the directions of mechanical counter/curvature measurement, mechanical roughness/irregularity measurement, etc. It can solve problems such as difficult to ensure bonding stability, lateral force falling off or separation, and achieve high Measuring accuracy and accuracy, not easy to fall off, and prolonging the service life
Active Publication Date: 2008-06-18
晋城富联鸿刃科技有限公司
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Problems solved by technology
In this structure, the true ball 25 is completely fixed by the adhesive force of the adhesive 26 that covers the end of the capillary 22 and its inner chamber 23. It is difficult to ensure the stability of the combination, especially the true ball 25 itself is very Small, and its bonding surface cannot completely cover all the spherical surfaces, so the true sphere 25 is easy to fall off or separate under the lateral force when measuring the surface of the object
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[0033] The present invention will be further described in detail below in conjunction with the accompanying drawings.
[0034] see image 3 , the embodiment of the present invention provides a stylus 30 for measuring the surface shape of a high-precision object, which is the main moving measuring part of the surface shape measuring instrument. The contact pin 30 includes a tiny sleeve 32 , a spherical contact 35 with a small diameter, and a cylindrical pin 37 for connecting the spherical contact 35 and the sleeve 32 . Wherein, the tiny sleeve 32 has a hollow cylindrical inner chamber 33 whose inner diameter is equal to or slightly larger than the outer diameter of the pin 37 . The spherical contact 35 is a sphere, preferably a true sphere, its diameter is generally in the order of microns or millimeters, and a cylindrical groove (not shown) is provided. This groove extends from the outer surface of the sphere to the center of the sphere, and its shape and size match with the...
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The present invention belongs to the field of precise surface measurement technology. The contact needle for surface topographic measurement includes one casing with one opened end and one inside cavity; one pin with one first end and one second end; and one spherical contact head with one notch. The pin has the first end inserted into the notch of the spherical contact head and fixed through adhering or welding, and the second end inserted into the inside cavity of the casing and fixed through adhering, welding or riveting. The contact needle of the present invention has the advantages of high measurement precision, high stability and long service life. In addition, the present invention provides the preparation process of the contact needle.
Description
【Technical field】 [0001] The invention relates to a surface topography measuring instrument, in particular to a fine spherical stylus structure of a high-precision surface topography measuring device and a preparation method thereof. 【Background technique】 [0002] There are many methods for measuring the surface shape and surface roughness of objects, which can be divided into contact measurement methods and non-contact measurement methods, such as scanning electron microscope measurement and atomic force microscope measurement. Measurement. However, for most practical engineering applications, it is not necessary to achieve the level of precision of atomic surface topography, only the surface topography of objects needs to be studied. [0003] Contact measuring devices (such as stylus profilers) use a special stylus to move along the surface of the measured object at a certain speed. Due to the microscopic unevenness of the surface of the object, the stylus moves up and d...
Claims
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IPC IPC(8): G01B5/20G01B5/28
CPCG01B5/28
Inventor 中川威雄刘庆陈德成
Owner 晋城富联鸿刃科技有限公司