Optical cryostat

A technology of ellipsometry and cryostats, applied in measuring devices, scientific instruments, material analysis through optical means, etc.

Inactive Publication Date: 2008-10-01
SHENZHEN UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the prior art sample support device cannot meet the requirements of ellipsometry research on materials under the condition of low temperature and variable temperature.

Method used

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  • Optical cryostat

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Embodiment Construction

[0007] Such as figure 1 As shown, an optical cryostat for ellipsometric measurement includes a rotatable support 1 and a sample holder 4 mounted on the support 1 for fixing samples. The cryostat also includes a sample chamber 3 and a sample chamber 3. A cooling device that provides a cold source. On the wall of the sample chamber 3, an incident window 2 and an exit window 5 made of quartz material are provided with adjustable relative positions. The sample holder 4 is set in the sample chamber 3. When using a photometric ellipsometer for measurement, the material sample to be measured is fixed on the sample holder, the cold source provided by the refrigeration device makes the sample chamber where the sample is located reach the required temperature, and the linear polarization is polarized from a certain incident angle direction each time. When light is projected onto the sample, the relative positions of the entrance and exit windows on the wall of the sample chamber can be ...

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Abstract

A thermostat of optical low temp consists of support column being able to rotate, sample frame on the column in sample chamber for fixing sample, sample chamber with light incoming and outgoing widows being prepared by transparent material and being able to adjust their relative positions as well as refrigerating device for providing cold source to sample chamber.

Description

technical field [0001] The invention relates to a low-temperature thermostat, in particular to an optical low-temperature thermostat for ellipsometric measurement, which is mainly suitable for sample support of low-temperature variable-temperature multi-angle optical measurement. Background technique [0002] Spectroscopy ellipsometry has the characteristics of fast, high sensitivity and non-destructive measurement. It is an important experimental method for studying the optical and dielectric properties of solid materials, especially thin-film materials, in the near-infrared, visible and near-ultraviolet regions. The phase transition of materials as a function of temperature is an important part of materials science. Understanding the low-temperature properties of solid materials, especially magnetic materials, is crucial to understanding the correlation between their microstructure and macroscopic properties. At present, the phase transition of magnetic thin film material...

Claims

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Application Information

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IPC IPC(8): G01N21/17G12B9/08F25D3/10
Inventor 舒启清柳文军马晓翠金书林
Owner SHENZHEN UNIV
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