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Piezoelectric three dimension acceleration sensor

A three-dimensional acceleration and sensor technology, which is applied in the direction of multi-dimensional acceleration measurement and acceleration measurement using inertial force, etc., can solve the problems of sensor volume and self-heavy, inability to overcome measurement error, low sensitivity, etc., and achieve simple structure, light weight, and high sensitivity. high effect

Inactive Publication Date: 2008-10-29
CHONGQING UNIV
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AI Technical Summary

Problems solved by technology

At present, the known piezoelectric three-dimensional acceleration sensors mainly adopt two schemes. One is to install three unidirectional acceleration sensors with independent outputs in a metal shell, and they are installed vertically together. The volume and self-weight of the sensor are too large; the other is a shear and compression composite three-dimensional piezoelectric acceleration sensor, such as figure 1 As shown, it is to install three groups of piezoelectric elements on the base in such a way that the maximum sensitivity axes form a 90° angle with each other, and then install the inertial mass on the piezoelectric elements and pre-tighten the housing and the base. Welded together, but the output signal of this piezoelectric three-dimensional acceleration sensor is weak when the external vibration force is small, the sensitivity is not high, and it cannot overcome the measurement error caused by the change of the environment

Method used

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  • Piezoelectric three dimension acceleration sensor

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0017] Embodiment 1 (with reference to Fig. 4,5,6):

[0018] This example is on the basis of the general description part, further refinement in improving the processing technology of the present invention, in this example, each quartz wafer (81,82,83,84,85,86,87,88) Each of the two sides has an electrode ( 801 , 802 ) connected to a corresponding signal lead, and all the electrodes ( 801 , 802 ) are located at the edge of the wafer positioning frame 3 .

Embodiment 2

[0019] Embodiment 2 (with reference to Fig. 2):

[0020] This example is based on the general description or Example 1, and is a specific example for the isolation base therein. In this example, the cross-section of the solid part of the annular groove between the waist of the isolation base 1 is a square (this cross-sectional view is not drawn), its four sides are parallel to the four sides of the base mounting plate 11, and its perimeter is equal to the base mounting plate 1 / 2 of the circumference of 11 (obviously, the solid part of the annular groove and the axis of the base mounting plate 11 are all coaxial with the pre-tightening bolts).

Embodiment 3

[0021] Embodiment 3 (with reference to Fig. 2):

[0022] This example is based on the general description or Example 1, and is a specific example for the isolation base therein. In this example, the cross-section of the solid portion of the waist ring groove of the isolation base 1 is circular (the cross-sectional view is not shown), and its diameter is 1 / 2 of the length of any side of the base mounting plate 11 .

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Abstract

The invention relates to a piezoelectric type 3D acceleration transducer that includes an isolating base, case, subpanel upper piezoelectric component, insulation spacer and inertia mass block, and signal leading yarn. The piezoelectric component includes four XO degree cut quartz wafer and four YO degree cut quartz wafer. They are installed in four angles and four borders of the wafer locating frame between the isolation spacers. The invention has the advantages of light weight, simple structure, and is easy to manufacture. It has high sensitivity and could conquer the error brought by the alteration of environment.

Description

technical field [0001] The invention relates to an acceleration sensor, in particular to a piezoelectric acceleration sensor capable of three-dimensional acceleration measurement. Background technique [0002] Piezoelectric three-dimensional acceleration sensors can simultaneously measure vibration or shock acceleration in three directions in space. At present, the known piezoelectric three-dimensional acceleration sensors mainly adopt two schemes. One is to install three unidirectional acceleration sensors with independent outputs in a metal shell, and they are installed vertically together. The volume and self-weight of the sensor are too large; the other is a shear and compression composite three-dimensional piezoelectric acceleration sensor, such as figure 1 As shown, it is to install three groups of piezoelectric elements on the base in such a way that the maximum sensitivity axes form a 90° angle with each other, and then install the inertial mass on the piezoelectric...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01P15/09G01P15/18
Inventor 刘俊秦岚刘京诚李敏
Owner CHONGQING UNIV
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