Core kernel modeling method for micro inertial sensor device and core kernel base

A technology of inertial sensor and modeling method, which is applied in the design field of micro-electromechanical systems, can solve the problems of reusable core modeling without relevant literature reports, inconvenient integration of mixed-signal simulation, etc.

Inactive Publication Date: 2008-11-05
NORTHWESTERN POLYTECHNICAL UNIV
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Problems solved by technology

Similarly, UC Berkeley in the United States established a reusable core that supports system-level modeling of inertial MEMS devices on the MATLAB platform, but because it uses MATLAB language programming, it is not easy to integrate the model with the circuit model to achieve mixed-signal simulation
[0004] At present, there is no relevant literature report on the modeling of reusable cores of micro-inertial sensor devices in China

Method used

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  • Core kernel modeling method for micro inertial sensor device and core kernel base
  • Core kernel modeling method for micro inertial sensor device and core kernel base
  • Core kernel modeling method for micro inertial sensor device and core kernel base

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Embodiment Construction

[0069] The present invention will be further described now in conjunction with accompanying drawing:

[0070] The core model of inertial microstructure is defined by taking space beam and comb structure variable capacitors as examples.

[0071] The core model of the space beam:

[0072] The mechanical behavior modeling method of the microstructure is used to establish its behavior model, and then its core model is defined according to the definition method of the microstructure core model.

[0073] ■In the local coordinate system

[0074] The two ends of the beam (subscripts 1 and 2 represent the two ends) are used to reflect and study the stress and deformation of the beam. Assuming that the tension, compression, bending and torsion of the beam are independent of each other, in the case of small linear displacement and angular displacement, the behavior equation of the beam in the local coordinate system is:

[0075] M ′ · ...

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Abstract

The micro inertial sensor kernel mold establishing method and kernel library belongs to the field of design technology of micro electromechanical system. Technologically, the present invention features that electromechanical micro structure behavior mold is first established by means of combined mechanical behavior mold establishing method and force coupling behavior mold establishing method and reusable kernel for micro inertial sensor is then formed according to kernel mold establishing method. The present invention also includes kernel library established based on the said method, the establishment of parameter kernel molds for typical functional structural parts of MEMS inertial devices in 3D space, and kernel library as the integration of kernel molds. The present invention has universal theoretical significance and may provide technological support for research and development of micro gyro, micro accelerometer, etc.

Description

Technical field: [0001] The invention relates to a core modeling method of a miniature inertial sensor device and a core library thereof, belonging to the design field of micro-electromechanical systems. It is a computer-aided design for inertial micro-electromechanical systems and typical electrostatic micro-actuators and electrostatic detection micro-sensors. Background technique: [0002] Inertial sensing devices based on MEMS technology, such as micro-accelerometers, micro-gyroscopes, and micro-inertial measurement combinations, are important types of MEMS device research. The micro-inertial sensor device based on MEMS technology is a system integrating circuit and micro-mechanical structure. The modeling and simulation analysis of its overall behavior (system-level behavior) is the focus and difficulty of its computer-aided design. The modeling method based on the reusable core (.Intellectual Property, IP) is an effective method to realize the system-level modeling of ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01P9/00G01P15/08G01C19/56
Inventor 苑伟政霍鹏飞马炳和齐大勇常洪龙李伟剑姜澄宇
Owner NORTHWESTERN POLYTECHNICAL UNIV
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