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Surface treatment method

A surface treatment and workpiece surface technology, applied in ion implantation plating, metal material coating process, coating, etc., can solve the problems that affect the effect of film layer treatment, difficult to combine, intensified oxidation behavior, etc., to achieve the solution of film layer poorly bonded effect

Inactive Publication Date: 2009-04-01
北京东方新材科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Even in the vacuum environment of the traditional PVD process, this oxidation phenomenon cannot be avoided, and the higher heating temperature intensifies the oxidation behavior
Oxidation of the workpiece will form an oxide film on its surface. If this oxide film cannot be effectively removed, the PVD film will not easily form a good bond with the workpiece, which will greatly affect the effect of the film treatment.

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0019] The workpiece made of No. 45 steel is ultrasonically cleaned with acetone for 5-30 minutes to remove oil, after rinsing, soak the workpiece with sulfuric acid with a concentration of 0.5-2.0% to remove the oxide film on the surface of the workpiece, and then rinse with tap water to remove acid Dehydrate by ultrasonic cleaning with ethanol. Put the workpiece into the vacuum chamber after drying, and pump the vacuum chamber to the back vacuum. Turn on the ion source, pass Ar gas into the vacuum chamber, and bombard the workpiece with energetic ions for 10-15 minutes to remove the oxide film on the surface of the workpiece.

[0020] Next, turn off the ion source and adjust the Ar flow rate to make the back vacuum reach the working pressure. Then, the evaporation source of Au is turned on, and the Au film is deposited to a thickness of 0.02 μm to form a metal that is not easily oxidized.

[0021] Next, turn off the Au evaporation source, continue to feed Ar gas, and heat ...

Embodiment 2

[0025] The workpiece made of No. 45 steel is ultrasonically cleaned with acetone for 5-30 minutes to remove oil, after rinsing, soak the workpiece with sulfuric acid with a concentration of 0.5-2.0% to remove the oxide film on the surface of the workpiece, and then rinse with tap water to remove acid Dehydrate by ultrasonic cleaning with ethanol. Put the workpiece into the vacuum chamber after drying, and pump the vacuum chamber to the back vacuum. Turn on the ion source, pass Ar gas into the vacuum chamber, and bombard the workpiece with energetic ions for 10-15 minutes to remove the oxide film on the surface of the workpiece.

[0026] Next, turn off the ion source and adjust the Ar flow rate to make the back vacuum reach the working pressure. Then, the evaporation source of Al is turned on, and an Al film is deposited to a thickness of 0.5 microns. The Al film is a metal capable of forming a protective oxide film.

[0027] Next, turn off the Al evaporation source, continue...

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Abstract

A method for enhancing oxidation work piece by physical gas-phase depositing method and the work piece therewith are disclosed. The process is carried out by impacting work piece surface to remove oxidation film by energy-carrier ion under vacuum, depositing non-oxidation metal(Au, Pt etc.) or metal(Al, Cr, Ni, Ti etc) layer with thickness 0.01-2 micron on work piece surface, heating work piece to requested temperature, impacting work piece surface to remove deposited metal and / or oxidation film by energy-carrier ion and depositing hard film layer or other film layer on work piece surface by normal physical gas-phase depositing method.

Description

technical field [0001] The invention relates to a method for surface treatment of easily oxidized workpieces and the workpieces treated by the method, more specifically, to a method for strengthening easily oxidized workpieces by physical vapor deposition and the workpieces treated by the method. Background technique [0002] Physical vapor deposition (PVD), as an advanced material surface modification technology, has been widely used in various fields such as tools, molds, and parts. The basic principle is to improve the service life and processing quality of the workpiece by depositing one or more layers of hard film or other film layers on the surface of the workpiece. In the traditional PVD process, in order to improve the bonding force between the film layer and the workpiece, the workpiece usually needs to be heated to a higher temperature (for example, 400 degrees). In China's current manufacturing industry, in order to save costs, many workpieces (such as tools, mol...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/00C23C14/02C23C14/54
Inventor 徐健张云龙程云立
Owner 北京东方新材科技有限公司
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