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Polymer film based miniature cell clamp and preparing process thereof

A preparation process and polymer technology, applied in metal material coating process, biochemical instruments, biochemical equipment and methods, etc., can solve the problems of environment and operation object influence, large power consumption, etc., and achieve low power consumption and high output power Large, large electric actuation displacement effect

Inactive Publication Date: 2009-05-06
SHENYANG INST OF AUTOMATION - CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Although a thermally actuated actuator can work in a liquid environment, it will affect the environment and the operating object due to heat loss, and requires a large power consumption

Method used

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  • Polymer film based miniature cell clamp and preparing process thereof
  • Polymer film based miniature cell clamp and preparing process thereof
  • Polymer film based miniature cell clamp and preparing process thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 2

[0049] The difference from Example 1 is that (see Figure 4 ):

[0050] 1) growing an oxide layer 7 of 1 micron on the silicon substrate 4 as an insulating layer;

[0051] 2) Sputtering aluminum with a thickness of 0.5 microns;

[0052] 3) A gold film 2 is deposited by sputtering as the lower electrode, and the known Lift-off suspension technology is used to realize graphic micromachining at the same time; the thickness is 0.5 microns;

[0053] 4) The thickness of NAFION film 3 is 0.5 micron;

[0054] Among them: before step 3), electron beam evaporation (e-beam evaporation) technology is used to deposit silicon dioxide layer 5 and chromium (or titanium) layer 6 in sequence, and step 3) is used to simultaneously realize silicon dioxide , chromium (or titanium) and the micrographic processing of the lower electrode film; wherein the silicon dioxide layer 5 is mainly used to increase the contact surface between the fixed end of the cantilever beam and the substrate and increa...

Embodiment 3

[0056] The difference from Example 3 is that (see Figure 5 ):

[0057] 1) growing a 2-micron oxide layer 7 on the silicon substrate 4 as an insulating layer;

[0058] 2) Sputtering aluminum with a thickness of 0.7 microns;

[0059] 3) A gold film 2 is deposited by sputtering as the lower electrode, and the known Lift-off suspension technology is used to realize graphic micromachining at the same time; the thickness is 0.15 microns;

[0060] 4) The thickness of NAFION film 3 is 0.3 micron;

[0061] Wherein: before step 7), the PARYLENEN-C film 1 is deposited on the upper and lower electrodes and the connecting lines connected with the upper and lower electrodes at room temperature. Erosion; Step 6) Using the photoresist AZ5214 as a mask, the oxygen plasma etching technique is used to process the micropattern.

Embodiment 4

[0063] The difference with embodiment 3 is:

[0064] Such as Figure 6 As shown, the present invention uses electron beam evaporation (e-beam evaporation) technology to separately deposit silicon dioxide layer 5, chromium or titanium layer 6 before step 3), and the present embodiment deposits silicon dioxide layer 5 separately; and 2 silicon dioxide layers Substrate NAFION microcantilever (gold / NAFION / gold sandwich structure).

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Abstract

This Invention propose one craft to use cell for grasp because of polymer membrane miniature cell's holder MEMS. This holder can have a lot of cantilever fine grain structure (similar to the hand claw structure). Each cantilever beam uses the coating craft to form by the gold / NAFION / gold three stories structure, one of roof beam's ends of the cantilever is connected with basis as the regular end. It can work in the ordinary aqueous solution. And connect with on the line using PARYLENE C membrane as and protecting in the electrode, is avoided the erosion of the solution around by the structure that its covers. Compare with the little holder that the little execution device that present commercial NAFION membrane forms and other existing technology formed, this little holder is not merely small (physical dimension is about 200mum * 800mum * 200mum), it is great to actuate displacement (very curly), and the working voltage is low, the consumption is little.

Description

technical field [0001] The invention is a novel micro-clamp used for cell operation, specifically a micro-cell-clamp based on polymer (NAFION) film and a preparation process. Background technique [0002] Micromanipulation of biological entities is an important need presented in today's biotechnology research. The current operations on biological cells (such as grabbing and material injection) are still mainly using traditional micropipette adsorption, the cell wall is easily damaged due to excessive suction, and the micropipette adsorption cannot achieve cell rotation. However, the development of modern biotechnology has required the selection of the injection route and the positioning of the injectant (such as RNA) in the cell during cell injection, so as to control the corresponding response of the cell, which puts forward higher requirements for cell micromanipulation. That is, the cell must be rotated while grasping it. The inadequacy of micropipette manipulation has ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C12M1/00C23C14/00C23F1/00C23F14/02
Inventor 李文荣周文利
Owner SHENYANG INST OF AUTOMATION - CHINESE ACAD OF SCI