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Electromagnetically driven two-way execution micro sampler preparation method

A technology of electromagnetic drive and sampler, which is applied in the direction of sampling device, material inspection product, biological test, etc.

Inactive Publication Date: 2009-06-03
INST OF ELECTRONICS CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0002] In modern biomedical applications, very small hypodermic needles are very much needed, and the smallest needle diameter is 305 μm, reaching the limit of traditional technology.

Method used

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  • Electromagnetically driven two-way execution micro sampler preparation method
  • Electromagnetically driven two-way execution micro sampler preparation method

Examples

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Embodiment Construction

[0011] A specific embodiment of the present invention will be described below in conjunction with the accompanying drawings.

[0012] This example is on a 8×10mm 2 On the silicon substrate 1, first use LPCVD to deposit Thick silicon nitride insulating layer 2, using radio frequency sputtering method to prepare chrome-gold thin film, photoetching out the solder joint 8 pattern of gold electrode 4 external circuit connection, and then performing the first 20 μm thick SU-8 glue 9 spray glue , exposure, and make the pattern of the reaction chamber 3; then carry out the second 20 μm thick SU-8 glue 10 to throw off the glue, expose, and make the pattern that the microneedle channel 6 communicates with the reaction chamber 3; then on the SU-8 film Sputter the gold film 11, perform the third 20 μm thick SU-8 glue 7 on the gold film 11 to throw off the glue, expose it, and make a magnetic column array pattern, and perform the first development to form an electroformed magnetic array ...

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Abstract

The electromagnetically driven two-way executing micro sampler consists of micro probe, micro channel and reactor chamber prepared with SU-8 photoresist on silicon substrate. The silicon substrate below the reactor chamber has deposited insulating SiN layer and made Ag electrode for detecting biological sample; and on the Ag film on the reactor chamber, there is permanent magnetic CoNiMnP micro array made through electroforming. By means of the action of outer controllable electromagnetic field on the permanent magnetic micro array, the volume variation of the reactor chamber and the two-way controlled process may be realized to reach the aim of sampling and sample feeding.

Description

technical field [0001] The invention relates to a preparation method of a micro-actuator, in particular to a preparation method of a micro-sampler utilizing electromagnetic control. Background technique [0002] In modern biomedical applications, very small hypodermic needles are very much needed, and the smallest needle diameter at present is 305 μm, which has reached the limit of traditional technology. Micro-scale microneedles can be fabricated using micro-electro-mechanical systems (MEMS) technology. In order to minimize the invasion of the human body, the microneedles can be made very thin and short, and do not touch the nerves so that people do not feel pain. With the development of biochips and micro-analysis systems based on MEMS technology, a corresponding micro-sampling and metering device is also required. Contents of the invention [0003] The purpose of the present invention is to provide a preparation method of an electromagnetically driven bidirectional mi...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N1/14G01N33/50
Inventor 赵湛陈绍凤张博军秦宁
Owner INST OF ELECTRONICS CHINESE ACAD OF SCI
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