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Apparatus for inspecting substrate and control method thereof

A substrate detection and control method technology, applied in the direction of measuring devices, measuring electricity, measuring electrical variables, etc., can solve the problems of lower production efficiency, long time for substrates to be transferred to the detection device, and longer process time, etc.

Active Publication Date: 2009-07-29
SAMSUNG ELECTRONICS CO LTD
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] However, in the prior art as described above, since the substrates like panels are sequentially transferred to the inspection device, and the time required to form and release the vacuum due to the recent trend of increasing the size of the substrates and the inspection of the substrates needs to be performed under a predetermined vacuum Etc., it takes a long time for the substrate to be transferred to the detection device, so that the entire process time is lengthened and the production efficiency is reduced

Method used

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  • Apparatus for inspecting substrate and control method thereof
  • Apparatus for inspecting substrate and control method thereof
  • Apparatus for inspecting substrate and control method thereof

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Embodiment Construction

[0026] Hereinafter, the substrate inspection device and its control method provided as the first embodiment of the present invention will be described in detail with reference to the accompanying drawings.

[0027] In the respective embodiments, the same reference numerals are used for the same constituent elements, and the same constituent elements are only representatively described in the first embodiment, and may be omitted in other embodiments.

[0028] The present invention relates to a substrate detection device 10 and its control method. The substrate detection device 10 provided according to the present invention is as follows Figure 1 to Figure 2d As shown, include: detection unit 20, this detection unit 20 has the detection part 21 for detecting substrate (13a to 13d) and the detection platform 23 that is used to support substrate (13a to 13d) and is used for moving detection platform 23 The stage driving part 25; the supply unit 30 provided at the entrance area of...

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Abstract

A substrate inspecting apparatus and a controlling method thereof are provided to improve a substrate inspecting time and to perform stably a substrate inspecting process. A substrate inspecting apparatus(10) includes an inspecting unit, a supply unit, and an exhaust unit. The inspecting unit(20) is composed of an inspecting portion(21) for inspecting a substrate, an inspecting stage for supporting the substrate, and a driving portion(25) for moving the inspecting portion and the inspecting stage. The supply unit(30) is installed at an inlet region of the inspecting unit. The supply unit is composed of a plurality of supply stages capable of supplying sequentially substrates to the inspecting unit. The exhaust unit(50) is installed at an outlet region of the inspecting unit. The exhaust unit is composed of a plurality of exhaust stages for supporting the substrates.

Description

technical field [0001] The invention relates to a substrate detection device and a control method thereof, in particular to a substrate detection device and a control method thereof that can detect substrates rapidly, simply and stably. Background technique [0002] The substrate is used for a flat display panel (FDP: flat display panel), LCD, and the like. The substrate forms signal lines on a predetermined substrate body and connects electronic devices such as integrated circuits, impedances, and switches or signal lines, so that they are electrically connected to each other or transmit signals. This substrate is subjected to reaction processes such as etching process and vapor deposition process. The board|substrate which has passed through these various processes is transferred to the board|substrate inspection apparatus for inspecting whether the electric defect (Electrical defect) exists. [0003] In order to improve the accuracy of substrate inspection, the substrat...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01R31/00G01R31/28H01L21/66
CPCG01R31/2601G01R31/2893
Inventor 李秀浩申定根申永植朴宜美郑和俊
Owner SAMSUNG ELECTRONICS CO LTD
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