Image pickup apparatus equipped with a microscope and size measuring apparatus

Abstract

The present invention provides a system that can be covered by other cameras when any one of them becomes abnormal in a microscope imaging device and a dimension measuring device having a plurality of cameras. Provided is a microscope imaging device and a dimension measuring device, wherein a plurality of imaging devices are respectively provided with retreat areas, and each camera has a stroke capable of moving to the position of a measurement point of an object to be measured. case, can be covered by the rest of the cameras.

Description

technical field [0001] The present invention relates to a dimension measuring device for measuring the size of a pattern formed on a substrate by enlarging the size of a pattern formed on a substrate with a microscope imaging device, and more particularly to a system for operating a plurality of cameras. Background technique [0002] Dimensional measuring devices use a microscope to magnify a pattern image obtained by irradiating a subject such as a pattern formed on a camera substrate with illumination light, and perform image processing on the pattern image obtained by capturing the image with an imaging device such as a CCD camera. , Automatic size measurement device. [0003] In the case of illuminating the subject with illumination light, there are reflected illumination methods in which the image obtained by illuminating the microscope through coaxial reflection and processing the reflected light, and illuminating the microscope from the back side of the sample and pro...

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Problems solved by technology

[0022] The purpose of the present invention is to solve the above problems, adopt the method of setting a plurality of microscope probes in order to shorten the production takt time, and measure the patterns at different positions through a plurality of microscopes at the same time, and enrich the backup function of the device in case of failure, so as to solve the problems caused by failure. The problem that the work efficiency of the coming device is reduced or the stability of the production line is reduced

[0023] In order to achieve the above object, the dimension measuring device of the present invention solves the problems caused by the failure by enriching the measurement method that adopts the method of setting a plurality of microscope measuring heads and measuring patterns at different positions through a plurality of microscopes at the same time, and the device backup function in case of failure. In order to solve the problem of lowering the operating rate of the device and the lowering of the stability of the production line, the following structure and control were carried out so that each of the plurality of microscope probes and the through-illumination device has a linear movement on the area to be measured on the glass substrate. stroke, even if at least one of the microscope probes fails or is in an abnormal state such as non-operation, the microscope probe in the malfunctioning or non-operating state is moved to the retracted position, and the other microscope probes are in the measured area of ​​the object to be measured It is possible to perform measurement processing while moving in the entire area of ​​the

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