Dynamic reference plane compensation
A reference plane, dynamic technique, applied in the field of surface analysis, which can solve problems such as corrupt data, head damage, damage, etc.
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[0014] In the following description, numerous specific details are set forth in order to provide a thorough understanding of embodiments of the invention. Embodiments of the invention may be practiced without some or all of these specific details. Additionally, well known process operations have not been described in detail in order not to unnecessarily obscure the present invention.
[0015] Additionally, reference in the specification to "one embodiment" or "an embodiment" means that a particular feature, structure or characteristic described in connection with the embodiment is included in at least one embodiment. The appearances of the phrase "in one embodiment" in various places in the specification may or may not all be referring to the same embodiment.
[0016] figure 1 is a schematic diagram of a system for dynamic reference plane compensation according to one embodiment. refer to figure 1 , the system includes a dual-channel differential phase detector 100 , a mea...
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