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Photoelectric detector receiving light on bevel

A photodetector and light receiving technology, applied in circuits, electrical components, semiconductor devices, etc., can solve the problems of increasing process and alignment difficulty, reducing coupling efficiency, increasing optical loss, etc., and reducing the difficulty of process and alignment , the effect of improving coupling efficiency and reducing optical loss

Active Publication Date: 2009-09-23
中科芯未来微电子科技成都有限公司
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Problems solved by technology

[0007] Regardless of which of the above schemes is adopted, since the photodetector is usually a light-receiving mode of planar light reception (such as image 3 as shown, image 3 It is a schematic diagram of a planar light-receiving photodetector in the prior art), the light-receiving active region 302 is located on the surface of the chip, the light 303 is incident perpendicular to the active region 302, and the direction of transmission of the optical signal 303 must be the same as that of the device active region surface 302 Vertical, so in the optical interconnection, the transmission direction of the optical path must be changed through oblique prisms or reflectors or the oblique section of the waveguide or other methods. At the same time, a precise optical path alignment device is required, which increases the difficulty of process and alignment and increases the cost. And increase the optical loss, reduce the coupling efficiency

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  • Photoelectric detector receiving light on bevel
  • Photoelectric detector receiving light on bevel
  • Photoelectric detector receiving light on bevel

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Embodiment Construction

[0035] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be described in further detail below in conjunction with specific embodiments and with reference to the accompanying drawings.

[0036] Such as Figure 4 as shown, Figure 4 The schematic diagram of the photodetector of the slope light receiving provided by the present invention, the active region of the photodetector light receiving is located on a slope of the V-shaped groove formed after the semiconductor substrate is etched, and the active region is outward from the surface of the slope It includes a buffer layer, an n-type ohmic contact layer, an intrinsic layer and a p-type ohmic contact layer in sequence, and the upper surface of the active region can be a single electrode or a double electrode, depending on the conductivity type of the substrate. The light-receiving active area 401 of the detector is located on the slope of the device, and...

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Abstract

The present invention relates to the technical field of photodetection devices for optical interconnection communication, and discloses a photodetector for receiving light on an inclined plane. On the upper surface, the active region includes a buffer layer, an n-type ohmic contact layer, an intrinsic layer and a p-type ohmic contact layer in sequence from the surface of the slope, and the upper surface of the active region is a single electrode or a double electrode. The photodetector for inclined plane light receiving provided by the present invention has an active area located on the inclined plane of the device, and can realize direct optical coupling with optical waveguides on various types of circuit boards, without changing the direction of optical transmission, forming a simple and efficient The optical detection receiving end simplifies the coupling alignment of the optical path. Since there is no need to change the transmission direction of the optical path, there is no need for a precise optical path alignment device, so that the difficulty of process and alignment is greatly reduced, the cost is reduced, the optical loss is reduced, and the coupling efficiency is improved.

Description

technical field [0001] The present invention relates to the technical field of photodetection devices for optical interconnection communication, and in particular to a photodetector for receiving light on an inclined plane. The waveguide achieves direct optical coupling without changing the direction of optical transmission, forming a simple and efficient optical detection receiving end, which is used for short-distance high-speed data transmission connections between chips, printed circuit boards or cabinets. Background technique [0002] With the rapid development of digital informationization, the demand for high-capacity and high-speed data exchange of high-performance computers and servers continues to increase. Different from long-distance communication, these high-speed data transmissions are generally within 300 meters, parallel multi-channel, and exist between cabinets, between printed boards and printed boards, and between chips on the same printed board. Its chara...

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L31/105H01L31/0352
Inventor 申华军李志华杨成樾万里兮李宝霞
Owner 中科芯未来微电子科技成都有限公司