Photoelectric detector receiving light on bevel
A photodetector and light receiving technology, applied in circuits, electrical components, semiconductor devices, etc., can solve the problems of increasing process and alignment difficulty, reducing coupling efficiency, increasing optical loss, etc., and reducing the difficulty of process and alignment , the effect of improving coupling efficiency and reducing optical loss
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[0035] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be described in further detail below in conjunction with specific embodiments and with reference to the accompanying drawings.
[0036] Such as Figure 4 as shown, Figure 4 The schematic diagram of the photodetector of the slope light receiving provided by the present invention, the active region of the photodetector light receiving is located on a slope of the V-shaped groove formed after the semiconductor substrate is etched, and the active region is outward from the surface of the slope It includes a buffer layer, an n-type ohmic contact layer, an intrinsic layer and a p-type ohmic contact layer in sequence, and the upper surface of the active region can be a single electrode or a double electrode, depending on the conductivity type of the substrate. The light-receiving active area 401 of the detector is located on the slope of the device, and...
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