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Quartz type pressure sensor, and production method therefor

A pressure sensor, quartz technology, applied in the direction of fluid pressure measurement using capacitance changes, etc., to achieve high reproducibility, small year-to-year changes, and increase production

Inactive Publication Date: 2009-12-09
SEIKO EPSON CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, in an air pressure sensor using ceramics as a detection piece, there is a problem that it is desirable to improve detection accuracy

Method used

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  • Quartz type pressure sensor, and production method therefor
  • Quartz type pressure sensor, and production method therefor
  • Quartz type pressure sensor, and production method therefor

Examples

Experimental program
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Embodiment Construction

[0072] Embodiments of the present invention shown in the drawings will be described in detail below.

[0073] figure 1 (a) and 1(b) are vertical sectional views showing the overall structure of the contact mode capacitive pressure sensor according to an embodiment of the present invention, and figure 1 (a) A sectional view taken along the line A-A shown.

[0074] A contact mode capacitance type pressure sensor (hereinafter referred to as "pressure sensor" or "contact mode type pressure sensor") 1 is accommodated in a container 20 made of an insulating material such as ceramics. The ceramic container 20 generally includes a bottom plate 21, four side walls 22 erected from the periphery of the bottom plate 21, and an upper cover 23 fixed to the upper opening formed by the side walls 22 and provided with a vent hole 23a.

[0075] Since the side wall 22 and the upper cover 23 are not necessary, a structure in which the detection sheet 10 and the like are assembled on the botto...

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Abstract

A quartz-type pressure sensor, which can solve the shortcomings of pressure sensors using silicon detection plates by using quartz as the detection plate of the pressure sensor, such as the difficulty in controlling the thickness of the diaphragm due to low etching precision and the resulting detection accuracy Low and poor reproducibility of elastic deformation. The pressure sensor includes: a bottom plate made of an insulating material; a lower electrode film and a dielectric film sequentially laminated on the surface of the bottom plate; to the surface of the bottom plate; an upper electrode film formed on at least a part of the thin wall portion and in a positional relationship to be opposite to the lower electrode film; and between the lower surface of the detection sheet and the dielectric film The pressure sensor is characterized in that the detection piece is made of quartz material.

Description

technical field [0001] The present invention relates to improvements to pressure sensors, and relates to a quartz pressure sensor whose reliability is improved by constituting a detection plate with a quartz plate, which is conventionally made of silicon material, and a manufacturing method thereof. Background technique [0002] Conventionally known is a tire pressure monitoring system that uses a pressure sensor to detect the air pressure of each tire mounted in a vehicle such as an automobile, and issues an alarm when an abnormality occurs. [0003] As an air pressure sensor that is installed in rubber tires of automobiles and the like and measures air pressure, the following technology is disclosed in Japanese Patent Application Laid-Open No. 2001-174357 in which a diaphragm made of ceramics and a diaphragm made of ceramics are used. The bases of the two parts are bonded to each other, and the change in the electrostatic capacity in the gap formed between these two parts ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01L9/12
Inventor 渡边润
Owner SEIKO EPSON CORP