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Apparatus and method for fast arc extinction in plasma process

A plasma and process technology, used in plasma welding equipment, plasma, arc welding equipment, etc.

Inactive Publication Date: 2009-12-16
ADVANCED ENERGY IND INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

This type of power supply requires an active circuit that senses the arc and requires a switching power supply

Method used

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  • Apparatus and method for fast arc extinction in plasma process
  • Apparatus and method for fast arc extinction in plasma process
  • Apparatus and method for fast arc extinction in plasma process

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Experimental program
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Embodiment Construction

[0026] refer to figure 2 , which shows a DC plasma processing apparatus 10 embodying the principles of the present invention. A DC power source 12 supplies power to the plasma 14 via an electrical cable 16 . A plasma 14 is ignited between electrodes (not shown) and contained within a chamber (not shown) to treat a workpiece on a substrate (also not shown, but known to those skilled in the art). In parallel with the output capacitor C1 is a shunt switch S1. The shunt switches may be insulated gate bipolar transistors (IGBTs), field effect transistors (FETs), or other suitable semiconductor switches.

[0027] The DC power supply should be designed as an adaptive current source on the time scale of the arc so that the output current does not become excessive when the output voltage decreases due to arcing. A common way to achieve high adaptability in a DC power supply is to have a sufficiently large inductor in series with the output, or a current controller with fast current...

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PUM

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Abstract

The present invention provides a new apparatus and method of operating a DC plasma process that shunts the power supply current from the plasma when an arc occurs, thereby inhibiting the flow of energy from the power supply to the plasma, and then when the power supply is reactivated to the plasma When the energy flow of the body is stopped, the energy is allowed to flow again. A shunt device is connected to the output of the power supply to shunt current away from the plasma when an arc is generated, wherein the shunt device is activated and shunts the current for a first predetermined time when an arc is detected at the output. At the end of the first predetermined time before the current reaches zero, the shunt means is switched off, with current re-flowing to the plasma; and if the arc is not extinguished, the shunt means is reactivated at the end of a second predetermined time.

Description

technical field [0001] The present invention relates generally to power supplies for detecting and preventing or extinguishing arcs in plasma processing applications, and more particularly to direct current processes and apparatus and methods for extinguishing arcs therein. Background technique [0002] In plasma-based processes, cathodic arcing occurs when a discharge occurs between a point on the insulator where charge builds up and a point on the cathode. Then the impedance of the plasma collapses, which is often called micro-arcing. In the past, micro-arcing was considered insignificant and ignored. Typically, the presence of micro-arcing cannot be detected because the power supply does not directly detect its presence. If the micro-arc is not extinguished quickly, a cascading effect occurs and the micro-arc becomes a so-called strong arc. The plasma is then discharged by this intense arc, generating very high intensity energy which, if not extinguished quickly, can h...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B23K9/00
CPCH05H1/36H01J2237/0206B23K10/006H01J37/32935H01J37/32944
Inventor 米兰·伊利克卡利安·N·C·西德巴图拉安德雷·B·马利宁
Owner ADVANCED ENERGY IND INC
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