Method of monitoring depositing temperature of cu seed layer and method for forming cu layer by using the same

Abstract

A method for monitoring a deposition temperature of a Cu seed layer by measuring an optical reflectivity of the Cu seed layer deposited on a substrate; and estimating the deposition temperature of the Cu seed layer by comparing the measured optical reflectivity with a reference optical reflectivity of a reference Cu seed layer in which an agglomeration phenomenon has not happened. The estimating step includes computing the deposition temperature of the Cu seed layer at a temperature higher than about -25 DEG C. which is a reference deposition temperature for depositing the reference Cu seed layer if the measured reflectivity is smaller than the reference optical reflectivity.

Description

technical field [0001] The present invention relates to a method for monitoring the deposition temperature of a copper seed layer and a method for forming a copper layer, more specifically, to a method capable of directly monitoring the deposition temperature of a copper seed layer based on whether condensation has occurred, and a A method of forming a copper layer more uniformly by using this monitoring method. Background technique [0002] As semiconductor devices tend to be more integrated and operate at higher speeds, methods of forming metal wirings using a copper (Cu) layer have been proposed. In particular, logic devices using a design rule of 130nm or less have implemented interconnection wiring with a Cu damascene process. [0003] The forming process of the Cu layer for the wiring structure includes the following steps: firstly, a Cu seed layer is formed; then, a thicker Cu layer is electroplated on the Cu seed layer. A damascene process has been introduced for C...

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Problems solved by technology

[0007] However, instead of directly confirming whether condensation has occurred in the Cu seed layer deposited on the substrate, this temperature determination process can be a very cumbersome and difficult task.

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