Magnetic disk substrate and production method of magnetic disk
A manufacturing method and substrate technology are applied in the field of magnetic disk manufacturing to achieve the effect of reducing scratches and improving the pass rate
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[0026] By using a diamond fixed abrasive at a disc speed of 15rpm and 100g / cm 2 A 2.5-inch lithium silicate type crystallized glass substrate was ground to a predetermined thickness under a processing pressure of (approximately 7354 Pa). Next, through the rotation speed of the disc of 30rpm and the speed of 55g / cm 2 Polishing was performed for 40 minutes at (approximately 5393 Pa) by setting the processing rate at 0.10 to 0.15 μm / min and the pad groove width at 3 mm. After rinsing with water, surfactant and isopropanol and then drying, the final glass substrates (150 per batch) were inspected for scratches by optical microscopy. As a result, the rejection rate due to the presence of scratches was about 1% on average. On the glass substrate of the qualified product obtained at last, a 60nm chromium film as the base layer and a 20nm Co 13 Cr 6 Pt 3 Ta alloy film and a 10nm diamond-like carbon film as a protective layer. Furthermore, a perfluoropolyether lubricating layer w...
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Abstract
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