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Precise multifunctional lifting platform

A lifting platform, multi-functional technology, applied in the direction of lifting frame, lifting device, etc., can solve the problems of high cost, difficult precision machining, unable to monitor the pressure of the platform, etc., and achieve the effects of high cost performance, simple structure and novel design

Inactive Publication Date: 2007-08-08
山西中电科新能源技术有限公司
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  • Summary
  • Abstract
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Problems solved by technology

[0003] The invention solves the technical problems that the existing precision machinery, especially the lifting platform of microelectronic equipment is difficult to manufacture and process, the cost is high, and the pressure on the platform cannot be monitored.

Method used

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specific Embodiment approach

[0011] The present invention adopts two-level linear guide rails, and the first-level guide rails fixed on the sliding outer frame 4 realize the precise guidance of the platform; the second-level guide rails fixed on the sliding frame 5 ensure that when the platform moves to the lowest point (that is, when it is not working), The pressure detection point of the pressure sensor 7 does not touch the head of the piston rod of the cylinder 6, which prolongs the service life of the pressure sensor 7; the low-friction cylinder, pressure sensor, and precision pressure regulating valve cooperate with the computer system to realize the closed-loop control of pressure. The low-friction cylinder 6 and the small sliding part 14 are fixed with screws, the small sliding part 14 is connected with the sliding frame 5 through the cross roller guide rail, the sliding frame 5 is connected with the sliding outer frame 4 with the cross roller guide rail, and the two pairs of guide rails can be adjus...

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Abstract

A precision multi functional lifting platform solves the difficult machining, high cost and unable to monitor the force on the platform of existing micro electron device, which comprises controller, fixed base, feed screw fixed base with stepping motor, slide outer frame fixed with slide frame, small slide pieces on the slide frame, with its bottom connecting with the stepping motor through the feed screw, feed screw nut, synchronous pulley, synchronous belt, top of the slide outside frame fixed with the low friction air cylinder, active flange fixed on the top of the said slide frame, pressure sensor fixed under it. It is novel and simple in structure, amassing alighting pressure in a whole with good performance and cost ratio and extensive application.

Description

technical field [0001] The invention relates to a lifting platform, in particular to a lifting platform which integrates functions of lifting, pressurization and pressure measurement and is applied to precision machinery, especially microelectronic equipment. Background technique [0002] At present, the function of precision machinery, especially the lifting platform of microelectronic equipment, is realized by air suspension technology, but this technology requires that the manufacturing and processing of the lifting platform is very difficult, the cost is high, and the pressure on the platform cannot be monitored. Contents of the invention [0003] The invention solves the technical problems that the existing precision machinery, especially the lifting platform of microelectronic equipment is difficult to manufacture and process, the cost is high, and the pressure on the platform cannot be monitored. [0004] The technical solution adopted by the present invention to so...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B66F7/00
Inventor 王晓奎杨凯骏刘瑞霞霍灼琴
Owner 山西中电科新能源技术有限公司
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