Thin film transistor substrate and method of manufacturing the same and mask for manufacturing thin film transistor substrate
A substrate and mask technology, which is applied in the field of masks for manufacturing thin film transistor substrates, and can solve problems such as residual images
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[0073] Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings. However, the present invention is not limited to the embodiments, but can be implemented in various forms. These examples are provided for illustrative purposes only, so that those skilled in the art will more fully understand the scope of the present invention.
[0074] 1 is a plan view of a mask for forming a gate electrode according to an embodiment of the present invention, FIGS. 2 to 4 are cross-sectional views taken along line A-A in FIG. 1 to illustrate the formation of the gate electrode, and FIG. 5 is a view thereon A plan view of the substrate on which the gate electrode is formed.
[0075] Next, the formation of the gate electrode will be described with reference to FIGS. 1 to 5 . As shown in FIG. 2 , firstly, a first conductive film 121 is formed on the transparent insulating substrate 110 , and then a first photosensitive fi...
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